• Microelectronics
  • Vol. 52, Issue 1, 33 (2022)
YANG Yang, LEI Langcheng, GAO Weiqi, HU Yongfei, LIU Honghong, and FU Dongbing
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  • [in Chinese]
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    DOI: 10.13911/j.cnki.1004-3365.210266 Cite this Article
    YANG Yang, LEI Langcheng, GAO Weiqi, HU Yongfei, LIU Honghong, FU Dongbing. Study on Compensation Method for Polysilicon Resistance Linearity[J]. Microelectronics, 2022, 52(1): 33 Copy Citation Text show less
    References

    [1] CHUANG H M, THEI K B, TSAI S F, et al. Temperature-dependent characteristics of polysilicon and diffused resistors [J]. IEEE Trans Elec Dev, 2003, 50(5): 1413-1415.

    [2] RAMAN M S, BHATTACHARYA K E, BHAT K N. Physical model for the resistivity and temperature coefficient of resistivity in heavily doped polysilicon [J]. IEEE Trans Elec Dev, 2006, 53(8): 1885-1892.

    [3] ZUMBAHLEN H. Basic linear design [Z]. Analog Devices, Inc., 2007: 10.15-10.20.

    [4] SCHAFFT H A. Thermal analysis of electromigration test structures [J]. IEEE Trans Elec Dev, 1987, 34(3): 664-672.

    [5] MITTL S, GUARIN F. Self-heating and its implications on hot carrier reliability evaluations [C] // IEEE Int Reliab Phys Symp. Monterey, CA, USA. 2015.

    YANG Yang, LEI Langcheng, GAO Weiqi, HU Yongfei, LIU Honghong, FU Dongbing. Study on Compensation Method for Polysilicon Resistance Linearity[J]. Microelectronics, 2022, 52(1): 33
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