Fabrication of Silicon Micro/Nanostructures Based on Laser Interference Ablation

Zihan Wang; Baoxu Wang; Masaru Kamano; Weiwei Xu

doi:10.3788/LOP56.163201

Journals >Laser & Optoelectronics Progress >Volume 56 >Issue 16 >Page 163201 > Article

Laser & Optoelectronics Progress
Vol. 56, Issue 16, 163201 (2019)

Fabrication of Silicon Micro/Nanostructures Based on Laser Interference Ablation

Zihan Wang¹, Baoxu Wang¹, Masaru Kamano², and Weiwei Xu^2、*

Author Affiliations

¹ State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, Jilin 130012, China

² National Institute of Technology, Anan College, Anan, 7740017, Japan

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DOI: 10.3788/LOP56.163201 Cite this Article Set citation alerts

Zihan Wang, Baoxu Wang, Masaru Kamano, Weiwei Xu. Fabrication of Silicon Micro/Nanostructures Based on Laser Interference Ablation[J]. Laser & Optoelectronics Progress, 2019, 56(16): 163201 Copy Citation Text

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Zihan Wang, Baoxu Wang, Masaru Kamano, Weiwei Xu. Fabrication of Silicon Micro/Nanostructures Based on Laser Interference Ablation[J]. Laser & Optoelectronics Progress, 2019, 56(16): 163201

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