Fei Long, Fajia Zheng, Peizhi Jia, Bin Zhang, Jiakun Li, Qibo Feng. Research Status and Development Trend of Laser Multi-Degree-of-Freedom Simultaneous Measurement[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312012
- Laser & Optoelectronics Progress
- Vol. 60, Issue 3, 0312012 (2023)
![Grating interferometer. (a) Homodyne grating interferometer[7]; (b) heterodyne grating interferometer[8]](/richHtml/lop/2023/60/3/0312012/img_01.jpg)
Fig. 1. Grating interferometer. (a) Homodyne grating interferometer[7]; (b) heterodyne grating interferometer[8]
![Principle of straightness interferometry. (a) Two-dimensional grating interferometry[29]; (b) Wollaston prism interferometry[30-31]](/richHtml/lop/2023/60/3/0312012/img_02.jpg)
Fig. 2. Principle of straightness interferometry. (a) Two-dimensional grating interferometry[29]; (b) Wollaston prism interferometry[30-31]
![Measurement of roll angle by interferometry. (a) Heterodyne interferometry based on wave plate[49]; (b) light intensity method based on wave plate[50]](/Images/icon/loading.gif){kind=icon}
Fig. 3. Measurement of roll angle by interferometry. (a) Heterodyne interferometry based on wave plate[49]; (b) light intensity method based on wave plate[50]
Fig. 4. Measurement of roll angle based on diffraction grating. (a) Double grating interferometry[61]; (b) grating double beam method[63]
Fig. 5. Multi-degree-of-freedom error measurement system based on one-dimensional grating. (a) 6DOF error measurement system based on divergent light source[71]; (b) 5DOF error measurement system[73]
Fig. 6. Multi-degree-of-freedom error measurement system based on two-dimensional grating. (a) 6DOF measurement system based on reflective grating[81]; (b) 6DOFmeasurement system based on transmission grating[83]
Fig. 7. Multi-degree-of-freedom measurement system based on three cube-corner prisms. (a) Measurement system based on three cube-corner prisms[86]; (b) XM-60 6DOF error measurement system[87]
Fig. 8. Multi-degree-of-freedom measurement system based on two cube-corner prisms. (a) Femtosecond laser dispersion interferometer[90]; (b) 6DOF measurement system based on two cube-corner prisms[91]
Fig. 9. Error measurement system based on single cone 6DOF[93]
Fig. 10. Multi-degree-of-freedom measurement system based on a cube-corner prism. (a) 3DOF measurement system based on dual optical comb interference[96]; (b) schematic of dual-comb ranging system[98]; (c) time-domain characteristic of dual-comb system[98]; (d) principle of dual-comb combined ranging method[98]
Fig. 11. API XD Laser 6DOF error measurement system. (a) Photo of XD Laser system[99]; (b) optical path diagram of XD Laser system[99]
Fig. 12. Multi-degree-of-freedom measurement system based on right angle prism. (a) 6DOF measurement system based on right angle prism[107]; (b) 5DOF measurement system based on right angle prisms[112]
Fig. 13. X-Y platform 6DOF simultaneous measurement system[113]
Fig. 15. Simultaneous measurement system of 6DOF error based on conical hexaprism[117]
Fig. 16. Multi-parameter simultaneous measurement system of NC machine tool.(a) Single linear axis 6DOF error measurement system[126]; (b) 21 errors measurement system for 3 linear[129]; (c) simultaneous measurement of rotation axis 6DOF error[130]; (d) linear axis and rotation axis 6DOF error measurement scheme[131]
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