• Journal of Semiconductors
  • Vol. 42, Issue 2, 023104 (2021)
Min Tan1、2, Kaixuan Ye1, Da Ming1, Yuhang Wang1, Zhicheng Wang1, Li Jin3, and Junbo Feng3
Author Affiliations
  • 1School of Electronic and Optical Information, Huazhong University of Science and Technology, Wuhan 430074, China
  • 2Wuhan National Laboratory of Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
  • 3United Microelectronics Center, Chongqing 400030, China
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    DOI: 10.1088/1674-4926/42/2/023104 Cite this Article
    Min Tan, Kaixuan Ye, Da Ming, Yuhang Wang, Zhicheng Wang, Li Jin, Junbo Feng. Towards electronic-photonic-converged thermo-optic feedback tuning[J]. Journal of Semiconductors, 2021, 42(2): 023104 Copy Citation Text show less
    (Color online) (a) The convergence of electronics and photonics. (b) Design hierarchy of electronic-photonic convergence[2].
    Fig. 1. (Color online) (a) The convergence of electronics and photonics. (b) Design hierarchy of electronic-photonic convergence[2].
    (Color online) The unified model of a thermo-optic feedback tuning system.
    Fig. 2. (Color online) The unified model of a thermo-optic feedback tuning system.
    (Color online) TOPS structures of (a) conventional[6], (b) air-trench[7], (c) multi-bend[8], and (d) multi-pass[9].
    Fig. 3. (Color online) TOPS structures of (a) conventional[6], (b) air-trench[7], (c) multi-bend[8], and (d) multi-pass[9].
    Block diagrams of (a) multiple LDOs and (b) a TDM LDO that drives multiple TOPS.
    Fig. 4. Block diagrams of (a) multiple LDOs and (b) a TDM LDO that drives multiple TOPS.
    Driving the TOPS with (a) DAC and (b) PWM generator.
    Fig. 5. Driving the TOPS with (a) DAC and (b) PWM generator.
    (Color online) (a) Cross-section of a photoconductive n-doped silicon waveguide and its integration into a ring resonator to form an IRPH. (b) I–V characteristics of an IRPH with the input laser turned off and on. (c) Calibrated drop-port transmission and photocurrent of a single ring resonator filter relative to its resonance wavelength[35].
    Fig. 6. (Color online) (a) Cross-section of a photoconductive n-doped silicon waveguide and its integration into a ring resonator to form an IRPH. (b) IV characteristics of an IRPH with the input laser turned off and on. (c) Calibrated drop-port transmission and photocurrent of a single ring resonator filter relative to its resonance wavelength[35].
    (Color online) Left: Cross-section of the Si core waveguide, with the CLIPP electrode deposited on top of the SiO2 cladding. Right: Longitudinal profile of the Si waveguide showing the CLIPP equivalent circuit in the electrical domain[39].
    Fig. 7. (Color online) Left: Cross-section of the Si core waveguide, with the CLIPP electrode deposited on top of the SiO2 cladding. Right: Longitudinal profile of the Si waveguide showing the CLIPP equivalent circuit in the electrical domain[39].
    (Color online) Operating principle of a pipelined TDM scheme[51].
    Fig. 8. (Color online) Operating principle of a pipelined TDM scheme[51].
    (Color online) The general model for thermo-optic feedback wavelength control of a high-order MR filter.
    Fig. 9. (Color online) The general model for thermo-optic feedback wavelength control of a high-order MR filter.
    (Color online) The general model for thermo-optic feedback wavelength locking of an MR modulator.
    Fig. 10. (Color online) The general model for thermo-optic feedback wavelength locking of an MR modulator.
    Bias control schemes. (a) Output power monitor method. (b) Dithering method. (c) OMA monitor methods.
    Fig. 11. Bias control schemes. (a) Output power monitor method. (b) Dithering method. (c) OMA monitor methods.
    The general model for feedback polarization control.
    Fig. 12. The general model for feedback polarization control.
    (Color online) The proof-of-concept prototype in Ref. [69].
    Fig. 13. (Color online) The proof-of-concept prototype in Ref. [69].
    (Color online) A tunable WDM polarization-independent receiver with active polarization control[74].
    Fig. 14. (Color online) A tunable WDM polarization-independent receiver with active polarization control[74].
    The general model for the closed-loop optical phased array.
    Fig. 15. The general model for the closed-loop optical phased array.
    Ref.UndercutHeaterPπ (mW)Size (µm2) Bandwidth (kHz)Loss (dB)Resistance (Ω)
    [7] YesTiN0.4500 × 200.20.55
    [8] NoTi3.067 × 28390.9
    [9] NoMetal1.7880 × 36553.86
    [13] NoTiN2.56109 × 2110.11.23249.5
    [14] NoTiN21.4320 × 2.562.5< 0.4540
    NoN++Si22.8320 × 2.0159< 0.41100
    Table 1. Summary of TOPS designs.
    Ref.MonitorControllerPMCTOPSPhotonic deviceIntegration method
    [52] PhotodiodeLock to Max.PCB solutionDoping heater5-order MR filterPCB
    [34, 35] IRPHsLock to Ref.PCB solutionDoping heater4-order MR filterPCB/Computer
    [54] PhotodiodeLock to Min.PCB solutionMetal heater3-order MR filterPCB
    [55] PhotodiodeLock to Max.PWMDoping heaterSingle MR filterMonolithic
    Table 2. Summary of wavelength control of MR filters.
    Ref.MonitorControllerPMCTOPSPhotonic deviceIntegration method
    [45] PhotodiodeLock to Ref./Average power detectionDACDoping heaterDepletion MRMWire-bonding
    [56] PhotodiodeLock to Ref./Average power detectionPCB solutionMetal heaterDepletion MRMOff-chip
    [28] PhotodiodeLock to Max./OMA maximumDACMetal heaterDepletion MRMFlip-chip
    [46] PhotodiodeLock to Ref./Eye maximumDACc-Si heaterDepletion MRMMonolithic
    [33] Photodiode/Temperature sensorLock to Ref./OMA maximumDACDoping heaterDepletion MRMMonolithic
    [57] PhotodiodeLock to Ref./OMA maximumPower DACMetal heaterDepletion MRMCu-pillar 3D integration
    Table 3. Summary of wavelength locking of a Si MR Modulator.
    Ref.MonitorControllerPMCTOPSPhotonic deviceIntegration method
    [63] Photodiode (power detection)Lock to RefPCB solutionLiNbO3 MZM Computer
    [64] Photodiode (power detection)Lock to RefPCB solutionLiNbO3 MZM PCB
    [50, 65] Photodiode (dithering detection)Lock to RefPCB solutionLiNbO3 MZM Computer
    [62] Photodiode (dithering detection)Lock to RefPCB solutionMetal heaterSilicon MZMPCB
    [66] Photodiode (OMA detection)Max searchCharge pumpLiNbO3 MZM Integrated controller
    [67] Photodiode OMA + power detection)Max search and PID controlDACLiNbO3 MZM Integrated controller
    Table 4. Summary of bias control schemes.
    Ref.MonitorControllerPMCTOPSPhotonic deviceIntegration method
    1. GLD control algorithm. 2. Two-point step size gradient descent-based and two-stage optimization method-based control algorithms. 3. Two-point step size gradient descent-based control algorithms.
    [69] PowermeterManualMetal heater2DGC/3 dB coupler
    [71] PhotodiodeMin searchPCB solutionMetal heaterEdge coupler/PSR/TOPS/3 dB coupler/PDComputer
    [70] PhotodiodeMin search1PCB solution2DGC/GC/OTPS/MMI/PDComputer
    [73] PhotodiodeMin search2PCB solutionMetal heaterEdge coupler/TOPS/PSR/3 dB asymmetric coupler/PDComputer
    [74] PhotodiodeMin search3PCB solutionMetal heaterEdge coupler/TOPS/PSR/3 dB coupler/Micro-ring/Crossing/PDComputer
    Table 5. Summary of feedback polarization control schemes.
    Ref.MonitorControllerPMCTOPSPhotonic deviceIntegration method
    [4] PowermeterDACMetal heaterGrating coupler optical antennaMonolithic
    [76] IR cameraPWM driverDoping heaterGrating coupler optical antennaIntegrated drivers
    [77] PhotodetectorDACDoping heaterApodized grating antenna3D Integrated
    [78] IR cameraPCB solutionMetal heaterGrating coupler optical antennaPCB
    [79] PhotodetectorDACDoping heaterGrating coupler optical antennaMonolithic
    [81] IR CCDGradient-search algorithmDoping heaterEmitter
    [82] IR CCDInterference techniqueGrating coupler optical antenna
    [83] PhotodetectorDSGD2DACEmitter
    Table 6. Summary of the optical phased arrays.
    Min Tan, Kaixuan Ye, Da Ming, Yuhang Wang, Zhicheng Wang, Li Jin, Junbo Feng. Towards electronic-photonic-converged thermo-optic feedback tuning[J]. Journal of Semiconductors, 2021, 42(2): 023104
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