Jiahong Liu, Fang Zhang, Huijie Huang. Research Progress on Illumination System Technology of Step-and-Scan Projection Lithography Tools[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922011
- Laser & Optoelectronics Progress
- Vol. 59, Issue 9, 0922011 (2022)
Fig. 1. Schematic of illumination system of step-and-scan lithography tools
![Diagram of illumination mode development state[19]](/richHtml/lop/2022/59/9/0922011/img_02.jpg)
Fig. 2. Diagram of illumination mode development state[19]
![Schematic of different illumination modes by zoom Fourier transform lens group and axicon lens group[21]](/Images/icon/loading.gif){kind=icon}
Fig. 3. Schematic of different illumination modes by zoom Fourier transform lens group and axicon lens group[21]
Fig. 4. Schematic of pupil shaping based on micro-mirror array[25]
Fig. 5. Schematic of pupil compensation technology. (a) Schematic of filter[26]; (b) schematic of compensating finger[27]
Fig. 6. Schematic of intensity distribution of top-Gaussian illumination optical field[29]
Fig. 7. Schematic of homogenizing principle of integrator rod
Fig. 8. Schematic of working principle of illumination homogenization unit with MLAs[32]
Fig. 9. Schematic of finger array uniformity corrector[39]
Fig. 10. Schematic of generally used polarized illumination modes under traditional illumination mode[41]
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