Research Progress on Illumination System Technology of Step-and-Scan Projection Lithography Tools

Jiahong Liu; Fang Zhang; Huijie Huang

doi:10.3788/LOP202259.0922011

Journals >Laser & Optoelectronics Progress >Volume 59 >Issue 9 >Page 0922011 > Article

Laser & Optoelectronics Progress
Vol. 59, Issue 9, 0922011 (2022)

Research Progress on Illumination System Technology of Step-and-Scan Projection Lithography Tools

Jiahong Liu^1、2, Fang Zhang^1、*, and Huijie Huang^1、2、**

Author Affiliations

¹Laboratory of Information Optics and Optoelectronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²University of Chinese Academy of Sciences, Beijing 100049

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DOI: 10.3788/LOP202259.0922011 Cite this Article Set citation alerts

Jiahong Liu, Fang Zhang, Huijie Huang. Research Progress on Illumination System Technology of Step-and-Scan Projection Lithography Tools[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922011 Copy Citation Text

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Jiahong Liu, Fang Zhang, Huijie Huang. Research Progress on Illumination System Technology of Step-and-Scan Projection Lithography Tools[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922011

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