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    Journals >Acta Optica Sinica >Volume 41 >Issue 1 >Page 0112001 > Article
    • Acta Optica Sinica
    • Vol. 41, Issue 1, 0112001 (2021)
    Progress and Prospect of Optical Freeform Surface Measurement
    Rihong Zhu1,2,*, Yue Sun1,2, and Hua Shen1,2,**
    Author Affiliations
  • 1School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China
  • 2MIIT Key Laboratory of Advanced Solid Laser, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China
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    DOI: 10.3788/AOS202141.0112001 Cite this Article Set citation alerts
    Rihong Zhu, Yue Sun, Hua Shen. Progress and Prospect of Optical Freeform Surface Measurement[J]. Acta Optica Sinica, 2021, 41(1): 0112001 Copy Citation Text show less
    Typical applications of optical freeform surfaces. (a) AR head-mounted display[7]; (b) off-axis three-mirror system with ultra-wide field of view[20]
    Fig. 1. Typical applications of optical freeform surfaces. (a) AR head-mounted display[7]; (b) off-axis three-mirror system with ultra-wide field of view[20]
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    ZEISS XENOS commercial CMM system[23]
    Fig. 2. ZEISS XENOS commercial CMM system[23]
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    Taylor Hopson's commercial profilometers. (a) PGI Freeform profilometer[27]; (b) LuphoScan profilometer[29]
    Fig. 3. Taylor Hopson's commercial profilometers. (a) PGI Freeform profilometer[27]; (b) LuphoScan profilometer[29]
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    Schematic of optical surface measurement with SOC[35]. (a) Measurement principle of SOC; (b) scanning path of SOC
    Fig. 4. Schematic of optical surface measurement with SOC[35]. (a) Measurement principle of SOC; (b) scanning path of SOC
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    Schematic of Shark-Hartman wavefront detection[44]
    Fig. 5. Schematic of Shark-Hartman wavefront detection[44]
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    Schematic of structured light 3D measurement[47]
    Fig. 6. Schematic of structured light 3D measurement[47]
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    Measurement principle of CGH method[70]
    Fig. 7. Measurement principle of CGH method[70]
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    Layout of partial-null compensating interferometric system[92]
    Fig. 8. Layout of partial-null compensating interferometric system[92]
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    Test principle of Zernike freeform surface in Rochester University[86]
    Fig. 9. Test principle of Zernike freeform surface in Rochester University[86]
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    Principle of MANI system[88]
    Fig. 10. Principle of MANI system[88]
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    Schematic of flexible aberration generator used for compensating freeform surface in Anhui University[91]
    Fig. 11. Schematic of flexible aberration generator used for compensating freeform surface in Anhui University[91]
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    Test principle of ASSI[106]
    Fig. 12. Test principle of ASSI[106]
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    Measurement principle of CSSI[110]. (a) Schematic of CSSI system; (b) schematic of circular aperture partition
    Fig. 13. Measurement principle of CSSI[110]. (a) Schematic of CSSI system; (b) schematic of circular aperture partition
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    Irregular sub-aperture partition of interferograms[119]. (a)(d) Interferograms of biconic surface; (b)(e) resolvable sub-apertures; (c)(f) trimmed sub-apertures of Fig.14(b), (e); (g) ultimate result of sub-aperture partition
    Fig. 14. Irregular sub-aperture partition of interferograms[119]. (a)(d) Interferograms of biconic surface; (b)(e) resolvable sub-apertures; (c)(f) trimmed sub-apertures of Fig.14(b), (e); (g) ultimate result of sub-aperture partition
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    Measurement principle of TWI[121]. (a) Optical path layout; (b) interferogram array
    Fig. 15. Measurement principle of TWI[121]. (a) Optical path layout; (b) interferogram array
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    Measurement principle of TWI based on tip/tilt mirror[137]. (a) Optical path layout; (b) interferograms under different angles of tip/tilt mirror
    Fig. 16. Measurement principle of TWI based on tip/tilt mirror[137]. (a) Optical path layout; (b) interferograms under different angles of tip/tilt mirror
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    Layout of common-path TWI system[138]
    Fig. 17. Layout of common-path TWI system[138]
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    Abstract
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    Rihong Zhu, Yue Sun, Hua Shen. Progress and Prospect of Optical Freeform Surface Measurement[J]. Acta Optica Sinica, 2021, 41(1): 0112001
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