• Laser & Optoelectronics Progress
  • Vol. 60, Issue 19, 1923001 (2023)
Nan Zhang* and Rui Yin
Author Affiliations
  • School of Information Science and Engineering, Shandong University, Qingdao 266237, Shandong , China
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    DOI: 10.3788/LOP221128 Cite this Article Set citation alerts
    Nan Zhang, Rui Yin. Large Range and High-Sensitivity Pressure Sensor Based on Integrated Mach-Zehnder Interference[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1923001 Copy Citation Text show less
    References

    [1] Huang T Y, Lei R R, Cheng Z et al. Numerical study on dispersion turning effect based on Mach-Zehnder interferometers and its sensing performance[J]. Acta Optica Sinica, 42, 0513001(2022).

    [2] Li Y H, Chen Y, Liu H L et al. Respiration and heartbeat signal acquisition method based on fiber optic sensing[J]. Chinese Journal of Lasers, 49, 0406004(2022).

    [3] Zhou L J, Yu Y, Meng Z. Review of fiber optic ocean conductivity-temperature-depth sensor[J]. Laser & Optoelectronics Progress, 58, 1306019(2021).

    [4] Ji X W, Cui J M, Feng L H et al. Ring resonator pressure sensor based on LNOI[J]. Laser & Optoelectronics Progress, 59, 0323001(2022).

    [5] Duraibabu D B, Leen G, Toal D et al. Underwater depth and temperature sensing based on fiber optic technology for marine and fresh water applications[J]. Sensors, 17, 1228(2017).

    [6] Duraibabu D B, Poeggel S, Lewis E et al. Underwater pressure measurement using fibre optic extrinsic Fabry-Perot interferometric (EFPI) sensors[J]. Proceedings of SPIE, 9111, 911111(2014).

    [7] Woyessa G, Pedersen J K M, Nielsen K et al. Enhanced pressure and thermal sensitivity of polymer optical fiber Bragg grating sensors[J]. Optics & Laser Technology, 130, 106357(2020).

    [8] Yin R, Song Z R, Huang Q J et al. Integrated pressure sensor with large range and linear measurement based on SiO2 arrayed waveguide grating (AWG)[J]. Measurement, 170, 108705(2021).

    [9] Yin R, Huang Q J, Yang H L et al. Integrated-optics pressure sensor with improved range and sensitivity based on a SiO2 arrayed waveguide grating (AWG) and a 3D printed stereolithography resin module[J]. Measurement, 183, 109781(2021).

    [10] Liu X H, Li H, Ma L et al. Design of fiber optic F-P cavity pressure sensor based on bellows[J]. Proceedings of SPIE, 10849, 1084917(2018).

    [11] Zhao Q C, Liu X H, Wang Y Y et al. Optical fiber Fabry-Perot pressure sensor with silver-coated surface[J]. IOP Conference Series: Materials Science and Engineering, 493, 012156(2019).

    [12] Qi X G, Wang S, Jiang J F et al. Fiber optic Fabry-Perot pressure sensor with embedded MEMS micro-cavity for ultra-high pressure detection[J]. Journal of Lightwave Technology, 37, 2719-2725(2019).

    [13] Li H, Zhao Q C, Jiang S D et al. FP cavity and FBG cascaded optical fiber temperature and pressure sensor[J]. Chinese Optics Letters, 17, 040603(2019).

    [14] Zhou X L, Yu Q X, Peng W. Fiber-optic Fabry-Perot pressure sensor for down-hole application[J]. Optics and Lasers in Engineering, 121, 289-299(2019).

    [15] Lei X Q, Dong X P, Lu C X et al. Underwater pressure and temperature sensor based on a special dual-mode optical fiber[J]. IEEE Access, 8, 146463-146471(2020).

    [16] Li X F, Zhang H, Qian C Y et al. A new type of structure of optical fiber pressure sensor based on polarization modulation[J]. Optics and Lasers in Engineering, 130, 106095(2020).

    [17] Ohkawa M, Izutsu M, Sueta T. Integrated optic pressure sensor on silicon substrate[J]. Applied Optics, 28, 5153-5157(1989).

    [18] Mueller J, Zurhelle D, Fischer K H et al. Integrated optical pressure sensor with coupling structures[J]. Proceedings of SPIE, 1794, 167-178(1993).

    [19] De Brabander G N, Beheim G, Boyd J T. Integrated optical micromachined pressure sensor with spectrally encoded output and temperature compensation[J]. Applied Optics, 37, 3264-3267(1998).

    [20] Porte H, Gorel V, Kiryenko S et al. Imbalanced Mach-Zehnder interferometer integrated in micromachined silicon substrate for pressure sensor[J]. Journal of Lightwave Technology, 17, 229-233(1999).

    [21] Pelletier N, Beche B, Tahani N et al. Integrated Mach-Zehnder interferometer on SU-8 polymer for designing pressure sensors[C](2005).

    [22] Rochus V, Jansen R, Goyvaerts J et al. Design of a MZI micro-opto-mechanical pressure sensor for a SiN photonics platform[C](2016).

    [23] Rochus V, Jansen R, Figeys B et al. Double MZI micro-opto-mechanical pressure sensors for increased sensitivity and pressure range[C], 954-957(2017).

    [24] Rochus V, Jansen R, Goyvaerts J et al. Fast analytical model of MZI micro-opto-mechanical pressure sensor[J]. Journal of Micromechanics and Microengineering, 28, 064003(2018).

    [25] Shirai Y, Goto T, Ohkawa M et al. Silicon-based integrated optical pressure sensor using intermodal interference between TM-like and TE-like modes[J]. Proceedings of SPIE, 4277, 105-113(2001).

    [26] Ali Akbar Ganji M, Asadi R. Pressure sensor based on polarization rotation in z-cut LiNbO3 optical waveguide[J]. Sensors and Actuators A: Physical, 280, 521-524(2018).

    [27] Ganji M A A, Asadi R. Theoretical and experimental study of the photoelastic effect in channel waveguides in a diaphragm of LiNbO3[J]. Nanolithography, MEMS, and MOEMS, 16, 025502(2017).

    [28] de Brabander G N, Boyd J T, Beheim G. Integrated optical ring resonator with micromechanical diaphragms for pressure sensing[J]. IEEE Photonics Technology Letters, 6, 671-673(1994).

    [29] Pattnaik P K, Vijayaaditya B, Srinivas T et al. Optical MEMS pressure sensor using ring resonator on a circular diaphragm[C], 277-280(2005).

    [30] Zhao X, Tsai J M, Cai H et al. A nano-opto-mechanical pressure sensor via ring resonator[J]. Optics Express, 20, 8535-8542(2012).

    [31] Li Z Y, Liao C R, Wang Y P et al. Highly-sensitive gas pressure sensor using twin-core fiber based in-line Mach-Zehnder interferometer[J]. Optics Express, 23, 6673-6678(2015).

    [32] Ma Z M, Huang Y W, Meng H Y et al. Simultaneous measurement of temperature and pressure by utilizing an integrated Mach-Zehnder[J]. Journal of Lightwave Technology, 35, 4924-4929(2017).

    [33] Mao C, Huang B, Wang Y et al. High-sensitivity gas pressure sensor based on hollow-core photonic bandgap fiber Mach-Zehnder interferometer[J]. Optics Express, 26, 30108-30115(2018).

    [34] Li J Y, Huang Q J, Yin R et al. Customizable optical pressure sensor based on optimized asymmetric Mach–Zehnder interferometer: a review[J]. IEEE Sensors Journal, 20, 8903-8911(2020).

    Nan Zhang, Rui Yin. Large Range and High-Sensitivity Pressure Sensor Based on Integrated Mach-Zehnder Interference[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1923001
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