• Laser & Optoelectronics Progress
  • Vol. 60, Issue 19, 1923001 (2023)
Nan Zhang* and Rui Yin
Author Affiliations
  • School of Information Science and Engineering, Shandong University, Qingdao 266237, Shandong , China
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    DOI: 10.3788/LOP221128 Cite this Article Set citation alerts
    Nan Zhang, Rui Yin. Large Range and High-Sensitivity Pressure Sensor Based on Integrated Mach-Zehnder Interference[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1923001 Copy Citation Text show less

    Abstract

    We present a large range pressure sensor based on asymmetric Mach-Zehnder interference (AMZI) and a three-dimensional (3D) printed stereolithography resin module. The filtering characteristic is analyzed, and formulas show that the sensor's sensitivity is proportional to the length of one arm and inversely proportional to the diffraction order. In our design, high sensitivity is realized by a small diffraction order. The AMZI pressure sensor is fabricated using planar lightwave technology, and the pressure block is 3D printed with resin (DM11). The measured sensitivity is 0.3047 nm/MPa.
    Nan Zhang, Rui Yin. Large Range and High-Sensitivity Pressure Sensor Based on Integrated Mach-Zehnder Interference[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1923001
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