Nan Zhang, Rui Yin. Large Range and High-Sensitivity Pressure Sensor Based on Integrated Mach-Zehnder Interference[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1923001
- Laser & Optoelectronics Progress
- Vol. 60, Issue 19, 1923001 (2023)
Fig. 1. Structure diagram of AMZI sensor
Fig. 2. Assembly diagram of 3D printing pressure block and AMZI
Fig. 3. Detail dimensions. (a) AMZI chip; (b) 3D printed pressure block
Fig. 4. Theoretical calculation diagram of output spectra of AMZI pressure sensor
Fig. 5. Calculation sensitivity of AMZI pressure sensor
Fig. 6. AMZI pressure sensor and 3D printed pressure block
Fig. 7. Measurement system
Fig. 8. Test spectra of AMZI pressure sensor
Fig. 9. Test sensitivity of AMZI pressure sensor
|
Table 1. AMZI parameters
|
Table 2. Summary of research on large range optical pressure sensors by different technical routes
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20