• Journal of Semiconductors
  • Vol. 40, Issue 4, 042402 (2019)
Yaoyao Lu1、2, Daolin Cai1, Yifeng Chen1, Shuai Yan1、2, Lei Wu1、2, Yuanguang Liu1、2, Yang Li1、2, and Zhitang Song1
Author Affiliations
  • 1State Key Laboratory of Functional Materials for Informatics and Nanotechnology Laboratory, Shanghai Institute of Micro-System and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.1088/1674-4926/40/4/042402 Cite this Article
    Yaoyao Lu, Daolin Cai, Yifeng Chen, Shuai Yan, Lei Wu, Yuanguang Liu, Yang Li, Zhitang Song. Improving the data retention of phase change memory by using a doping element in selected Ge2Sb2Te5[J]. Journal of Semiconductors, 2019, 40(4): 042402 Copy Citation Text show less

    Abstract

    The crystallization characteristics of a ubiquitous T-shaped phase change memory (PCM) cell, under SET current pulse and very small disturb current pulse, have been investigated by finite element modelling. As analyzed in this paper, the crystallization region under SET current pulse presents first on the corner of the bottom electron contact (BEC) and then promptly forms a filament shunting down the amorphous phase to achieve the low-resistance state, whereas the tiny disturb current pulse accelerates crystallization at the axis of symmetry in the phase change material. According to the different crystallization paths, a new structure of phase change material layer is proposed to improve the data retention for PCM without impeding SET operation. This structure only requires one or two additional process steps to dope nitrogen element in the center region of phase change material layer to increase the crystallization temperature in this confined region. The electrical-thermal characteristics of PCM cells with incremental doped radius have been analyzed and the best performance is presented when the doped radius is equal to the radius of the BEC.
    $\nabla \cdot J = \nabla \cdot (\sigma \nabla V) = 0,$(1)

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    $\frac{{\partial (\rho CT)}}{{\partial t}} = Q + \nabla \cdot (k\nabla T),$(2)

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    $Q = \sigma {E^2} = \sigma {\left| {\nabla V} \right|^2}.$(3)

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    $x(t) = 1 - \exp \left( { - K{t^n}} \right),$(4)

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    $K(T) = v\exp \left( { - \frac{{{E_{\rm A}}}}{{{k_{\rm B}}{T}}}} \right),$(5)

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    $Q = J \cdot E,$(6)

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    $J = \sigma E.$(7)

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    Yaoyao Lu, Daolin Cai, Yifeng Chen, Shuai Yan, Lei Wu, Yuanguang Liu, Yang Li, Zhitang Song. Improving the data retention of phase change memory by using a doping element in selected Ge2Sb2Te5[J]. Journal of Semiconductors, 2019, 40(4): 042402
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