High-Precision ITO Electrode Wet Etching Technology Based on Maskless Lithography

Yi Yin; Zhijian Liu; Saijie Wang; Sen Wu; Zhijun Yan; Xinxiang Pan

doi:10.3788/LOP57.032202

[1] Lin H K, Hsu W C. Electrode patterning of ITO thin films by high repetition rate fiber laser[J]. Applied Surface Science, 308, 58-62(2014).

[2] Wang J W, Luo F F. Optical, electrical and magnetic properties of Fe ions implanted ITO thin film[J]. Jiangxi Science, 37, 17-20, 25(2019).

[3] Xi Z Y, Xu Q M, Zhao P et al. Review of the characteristies of ITO thin films and its development[J]. Journal of Xi'an University of Architecture &Technology(Natural Science Edition), 36, 109-112(2004).

[4] Sakamoto K, Kuwae H, Kobayashi N et al. Highly bendable transparent electrode using mesh patterned indium tin oxide for flexible electronic devices. [C]∥2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), April 9-12, 2017, Los Angeles, CA, USA. New York: IEEE, 323-326(2017).

[5] Yang H Y, Chen X, Qian Z Q. Design and preparation of ITO film filter used in thermal photovoltaic system[J]. Acta Optica Sinica, 33, 1231003(2013).

[6] Zhang Y H, Guo W L, Qin Y et al. Effects of ITO on proprieties of novel AlGaInP red LED[J]. Acta Optica Sinica, 30, 2401-2405(2010).

[7] Cai X Y, Wang X W, Li R X et al. Controllable modulation of surface plasmon resonance wavelength of ITO thin films[J]. Laser & Optoelectronics Progress, 55, 051602(2018).

[8] Heo J, Oh G T, Kwon S J et al. Fabrication of transparent ITO-Ag-ITO electrodes on polyethylene terephthalate substrate by Nd∶YVO4 laser direct patterning[J]. Molecular Crystals and Liquid Crystals, 645, 16-24(2017).

[9] Shen X F, Chen T. 291-[J]. Liu N. Patterning of ITO on glass with two-step using excimer laser, wet chemical re-etching. Advanced Materials Research, 294, 1393-1398(2011).

[10] Lee Y J, Bae J W, Han H R et al. Dry etching characteristics of ITO thin films deposited on plastic substrates[J]. Thin Solid Films, 383, 281-283(2001).

[11] Bi H M, Shi G B, Chen Z C et al. Preparation of interdigitated microelectrodes based on the combination of photolithography and electrochemistry technology[J]. Journal of Inner Mongolia University(Natural Science Edition), 49, 144-149(2018).

[12] Grisotto F, Métayé R, Jousselme B et al. Scanning electrochemical microscopy as an etching tool for ITO patterning[J]. Journal of Materials Chemistry, 21, 15962-15968(2011).

[13] Zhai L N, Zhou H L, Li X H et al. Etching of transparent and conductive indium tin oxide films[J]. Corrosion Science and Protection Technology, 26, 41-44(2014).

[14] Huang C J, Su Y K, Wu S L. The effect of solvent on the etching of ITO electrode[J]. Materials Chemistry and Physics, 84, 146-150(2004).

[15] Yao L, Zhang Y A, Lei X Y et al. Preparation of ITO transparent electrode for FPD[J]. Chinese Journal of Liquid Crystals and Displays, 23, 16-20(2008).

[16] Feng Q, Zhou M X, Hou Z L. Coating and developing technology introduction affects lithography process[J]. Equipment for Electronic Products Manufacturing, 46, 19-24(2017).

[17] Tsai T H, Wu Y F. Wet etching mechanisms of ITO films in oxalic acid[J]. Microelectronic Engineering, 83, 536-541(2006).

[18] Cui J J. Comparison of fast laser etching and wet lithography for flat panel display manufacturing[J]. Ome Information, 25, 11-18(2008).

[19] Wen W, Yang C R, Zhang J H et al. Study on wet-etching of ITO thin films based on PLZT[J]. Piezoelectrics & Acoustooptics, 30, 745-746, 750(2008).