Optical and Mechanical Properties and Microstructures of Nb2O5, Ta2O5 and SiO2 Thin Films Prepared by Ion Beam Sputtering

Wenjia Yuan; Weidong Shen; Xiaowen Zheng; Chenying Yang; Yueguang Zhang; Bo Fang; Wen Mu; Chaonan Chen; Xu Liu

doi:10.3788/AOS201737.1231001

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