Wenjia Yuan, Weidong Shen, Xiaowen Zheng, Chenying Yang, Yueguang Zhang, Bo Fang, Wen Mu, Chaonan Chen, Xu Liu. Optical and Mechanical Properties and Microstructures of Nb2O5, Ta2O5 and SiO2 Thin Films Prepared by Ion Beam Sputtering[J]. Acta Optica Sinica, 2017, 37(12): 1231001
- Acta Optica Sinica
- Vol. 37, Issue 12, 1231001 (2017)
Fig. 1. Structural diagram of DIBS system
Fig. 2. Transmission curves of Ta2O5 films prepared under different assisted ion source voltages
Fig. 3. Optical constants of different thin films prepared by different methods of EBE, IBAD and IBS when wavelength is 550 nm.(a) Nb2O5; (b) Ta2O5; (c) SiO2
Fig. 4. Stress value of different thin films prepared by three deposition methods of EBE, IBAD and IBS.(a) Nb2O5; (b) Ta2O5; (c) SiO2
Fig. 5. Hardness of different thin films prepared by three deposition methods of EBE, IBAD and IBS.(a) Nb2O5; (b) Ta2O5; (c) SiO2
Fig. 6. Young modulus of different thin films prepared by three deposition methods of EBE, IBAD and IBS.(a) Nb2O5; (b) Ta2O5; (c) SiO2
Fig. 7. Surface morphologies of Ta2O5 thin films prepared by (a) EBE, (b) IBAD, (c) SIBS and (d) DIBS
Fig. 8. Cross-sectional morphologies of Ta2O5 thin films prepared by (a) EBE, (b) IBAD and (c) DIBS
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Table 1. Process parameters of IBS deposition
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Table 2. Process parameters of EBE and IBAD
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