Optical and Mechanical Properties and Microstructures of Nb2O5, Ta2O5 and SiO2 Thin Films Prepared by Ion Beam Sputtering

Wenjia Yuan; Weidong Shen; Xiaowen Zheng; Chenying Yang; Yueguang Zhang; Bo Fang; Wen Mu; Chaonan Chen; Xu Liu

doi:10.3788/AOS201737.1231001

Journals >Acta Optica Sinica >Volume 37 >Issue 12 >Page 1231001 > Article

Acta Optica Sinica
Vol. 37, Issue 12, 1231001 (2017)

Optical and Mechanical Properties and Microstructures of Nb₂O₅, Ta₂O₅ and SiO₂ Thin Films Prepared by Ion Beam Sputtering

Wenjia Yuan, Weidong Shen^*, Xiaowen Zheng, Chenying Yang, Yueguang Zhang, Bo Fang, Wen Mu, Chaonan Chen, and Xu Liu

Author Affiliations

State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, China

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DOI: 10.3788/AOS201737.1231001 Cite this Article Set citation alerts

Wenjia Yuan, Weidong Shen, Xiaowen Zheng, Chenying Yang, Yueguang Zhang, Bo Fang, Wen Mu, Chaonan Chen, Xu Liu. Optical and Mechanical Properties and Microstructures of Nb₂O₅, Ta₂O₅ and SiO₂ Thin Films Prepared by Ion Beam Sputtering[J]. Acta Optica Sinica, 2017, 37(12): 1231001 Copy Citation Text

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