Long Trace Profiler for Measuring Groove Density of Diffraction Gratings

Xinpu Wu; Huaikun Wei; Zhengkun Liu; Keqiang Qiu; Xiangdong Xu; Yilin Hong

doi:10.3788/AOS202141.0612002

[1] Xu C Y[M]. Optics and engineering of synchrotron radiation, 113-178(2013).

[2] Li Z Y. Variable-line-spacing grating monochromators design and key techniques[D]. Hefei: University of Science and Technology of China, 85-90(2014).

[3] Liu A, He Y H, Li Q et al. Power spectral density test of large aperture optical elements by stitching interferometry[J]. Chinese Journal of Lasers, 46, 0204008(2019).

[4] Zhu R H, Sun Y, Shen H. Progress and prospect of optical freeform surface measurement[J]. Acta Optica Sinica, 41, 0112001(2021).

[5] Li M Y, Cao T F, Yuan X D et al. Effect of reference surface error on subaperture stitching for flat optics[J]. Chinese Journal of Lasers, 46, 1204006(2019).

[6] Zeng D H, Xiao T Q, Du G H et al. New long trace profiler based on phase plate diffraction for optical metrology of SSRF[J]. Review of Scientific Instruments, 77, 093305(2006). http://scitation.aip.org/content/aip/journal/rsi/77/9/10.1063/1.2186253

[7] Liu B, Wang Q P, Fu S J. Investigation of long trace profiler for aspherical optics[J]. Laser & Optoelectronics Progress, 43, 46-53(2006).

[8] Qian S N, Wang Q P, Hong Y L et al. Multiple functions long trace profiler (LTP-MF) for National Synchrotron Radiation Laboratory of China[J]. Proceedings of SPIE, 5921, 592104(2005). http://spie.org/Publications/Proceedings/Paper/10.1117/12.618800

[9] von Bieren K. Pencil beam interferometer for aspherical optical surfaces[J]. Proceedings of SPIE, 343, 101-108(1982). http://spie.org/Publications/Proceedings/Paper/10.1117/12.933743

[10] Takacs P Z, Church E L, Bresloff C J et al. Improvements in the accuracy and the repeatability of long trace profiler measurements[J]. Applied Optics, 38, 5468-5479(1999).

[11] Qian S N, Takacs P. Wave front-splitting phase shift beam splitter for pencil beam interferometer[J]. Review of Scientific Instruments, 74, 4881-4884(2003). http://scitation.aip.org/content/aip/journal/rsi/74/11/10.1063/1.1619556

[12] Senba Y, Kishimoto H, Ohashi H et al. Upgrade of long trace profiler for characterization of high-precision X-ray mirrors at SPring-8[J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 616, 237-240(2010). http://www.ingentaconnect.com/content/el/01689002/2010/00000616/00000002/art00027

[13] Li Z, Zhao Y, Li D C et al. A diffractive long trace profiler for large aspherical optics[J]. Acta Optica Sinica, 22, 1224-1228(2002).

[14] Li S, Gong Y. Error analysis and correction during measurement of tube-shaped super-smooth mirrors using long trace profiler[J]. Acta Optica Sinica, 31, 1112001(2011).

[15] Liao J S, Gong Y, Zhang W et al. Beam splitter with two Fresnel biprisms for long trace profiler[J]. Acta Optica Sinica, 34, 0123001(2014).

[16] Li M, Yang F G, Wang Q S et al. -09-03(2014).

[17] Yang F G, Li M, Liu P, method: CN103292728A[P] et al. -09-11(2013).

[18] Irick S C. McKinney W R. Measurement of diffraction gratings with a long trace profiler with application for synchrotron beamline gratings[J]. AIP Conference Proceedings, 417, 118-123(1997). http://scitation.aip.org/content/aip/proceeding/aipcp/10.1063/1.54581

[19] Senba Y, Kishimoto H, Miura T et al. Measurement of groove density variation of varied-line-space grating for high-resolution soft X-ray monochromator[J]. Proceedings of SPIE, 8501, 850104(2012). http://spie.org/Publications/Proceedings/Paper/10.1117/12.936518

[20] Cocco D, Sergo R, Sostero G et al. High-precision measurements of the groove density of diffraction gratings[J]. Proceedings of SPIE, 4146, 143-150(2000).

[21] Cocco D, Sostero G, Zangrando M. Technique for measuring the groove density of diffraction gratings using the long trace profiler[J]. Review of Scientific Instruments, 74, 3544-3548(2003). http://scitation.aip.org/content/aip/proceeding/aipcp/10.1063/1.1584080

[22] Sheung J, Qian J, Sullivan J et al. Metrology of variable-line-spacing X-ray gratings using the APS Long Trace Profiler[J]. Proceedings of SPIE, 1038, 1038508(2017). http://adsabs.harvard.edu/abs/2017SPIE10385E..08S

[23] et alExplanation of the round interference fringes in the measurement of varied-line-space gratings[J]. Optics and Precision Engineering, 10, 634-638(2002). http://en.cnki.com.cn/Article_en/CJFDTOTAL-GXJM200206020.htm

Zhu X B, Fu S J, Ye W Q. Explanation of the round interference fringes in the measurement of varied-line-space gratings,[J]. Optics and Precision Engineering, 10, 634-638(2002).

[24] Zhu X B, Fu S J, Ye W Q et al. Interferometric measurement of the line density of varied-line-space gratings[J]. Acta Optica Sinica, 23, 1354-1358(2003).

[25] Chen Q, Wang Q P, Yu X J et al. The groove density measurement of VLS plane grating by diffraction method[J]. Nuclear Techniques, 24, 557-563(2001).

[26] Chen Q, Hu Z W, Yu X J et al. Performance of a grating groove density measuring system by diffraction method[J]. Nuclear Techniques, 27, 9-13(2004).

[27] Liu B, Lou J, Liu Z K et al. Determination of groove density for bending gratings[J]. Optics and Precision Engineering, 14, 986-989(2006).

[28] Thomasset M, Dvorak J, Brochet S et al. Grating metrology for X-ray and V-UV synchrotron beamlines at SOLEIL[J]. The Review of Scientific Instruments, 90, 021714(2019). http://www.researchgate.net/publication/331213392_Grating_metrology_for_X-ray_and_V-UV_synchrotron_beamlines_at_SOLEIL