Long Trace Profiler for Measuring Groove Density of Diffraction Gratings

Xinpu Wu; Huaikun Wei; Zhengkun Liu; Keqiang Qiu; Xiangdong Xu; Yilin Hong

doi:10.3788/AOS202141.0612002

Journals >Acta Optica Sinica >Volume 41 >Issue 6 >Page 0612002 > Article

Acta Optica Sinica
Vol. 41, Issue 6, 0612002 (2021)

Long Trace Profiler for Measuring Groove Density of Diffraction Gratings

Xinpu Wu, Huaikun Wei, Zhengkun Liu^*, Keqiang Qiu, Xiangdong Xu, and Yilin Hong

Author Affiliations

National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, Anhui 230029, China

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DOI: 10.3788/AOS202141.0612002 Cite this Article Set citation alerts

Xinpu Wu, Huaikun Wei, Zhengkun Liu, Keqiang Qiu, Xiangdong Xu, Yilin Hong. Long Trace Profiler for Measuring Groove Density of Diffraction Gratings[J]. Acta Optica Sinica, 2021, 41(6): 0612002 Copy Citation Text

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Xinpu Wu, Huaikun Wei, Zhengkun Liu, Keqiang Qiu, Xiangdong Xu, Yilin Hong. Long Trace Profiler for Measuring Groove Density of Diffraction Gratings[J]. Acta Optica Sinica, 2021, 41(6): 0612002

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