• Laser & Optoelectronics Progress
  • Vol. 60, Issue 3, 0312017 (2023)
Yongqiu Zheng1, Jiamin Chen1、2, Xinyu Zhao1, Jiandong Bai1, Liyun Wu1, and Chenyang Xue1、*
Author Affiliations
  • 1State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, Shanxi, China
  • 2School of Software, North University of China, Taiyuan 030051, Shanxi, China
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    DOI: 10.3788/LOP222693 Cite this Article Set citation alerts
    Yongqiu Zheng, Jiamin Chen, Xinyu Zhao, Jiandong Bai, Liyun Wu, Chenyang Xue. MEMS Optical Acoustic Sensor[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312017 Copy Citation Text show less
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    Yongqiu Zheng, Jiamin Chen, Xinyu Zhao, Jiandong Bai, Liyun Wu, Chenyang Xue. MEMS Optical Acoustic Sensor[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312017
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