Yongqiu Zheng, Jiamin Chen, Xinyu Zhao, Jiandong Bai, Liyun Wu, Chenyang Xue. MEMS Optical Acoustic Sensor[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312017
- Laser & Optoelectronics Progress
- Vol. 60, Issue 3, 0312017 (2023)
![Schematic diagram. (a)MEMS optical and acoustic sensor based on microstructured fiber grating; (b) fiber Bragg grating[12]](/richHtml/lop/2023/60/3/0312017/img_01.jpg)
Fig. 1. Schematic diagram. (a)MEMS optical and acoustic sensor based on microstructured fiber grating; (b) fiber Bragg grating[12]
Fig. 2. Schematic diagram of optical fiber interferometer acoustic sensitivity principle. (a) MI; (b) SI; (c) MZI; (d) FPI
![Experimental results. (a) Structure diagram of TC-ULPFG[24]; (b) steel square plane and Co2+-doped FBGs; (c) scanning electron microscopy image of the crossed Co2+-doped micro-FBG[8]](/Images/icon/loading.gif){kind=icon}
Fig. 3. Experimental results. (a) Structure diagram of TC-ULPFG[24]; (b) steel square plane and Co2+-doped FBGs; (c) scanning electron microscopy image of the crossed Co2+-doped micro-FBG[8]
Fig. 4. Micro all fiber suspension core sensor. (a) Schematic diagram of FPI acoustic sensor with microfiber Bragg grating[36]; (b) schematic diagram of suspension core sensor; (c) image of suspension core sensor[38]
Fig. 5. Schematic diagram of optical fiber ultrasonic sensors for ultrasonic detection[47]
Fig. 6. Sectional and physical drawings of a small hydrophone based on photonic crystal film[52]
Fig. 7. Schematic and physical drawings of a fiber-optic Fabry-Perot acoustic sensor based on a multilayer graphene film approximately 100 nm thick[53]
Fig. 8. Acoustic sensor based on metal film. (a) Image of fiber-optic Fabry-Perot interference acoustic sensor based on large area silver film[60]; (b) image of fiber-optic microphone based on corrugated silver diaphragm[61]
Fig. 9. Fiber FPI microphone. (a) Components used for assembling the bionic directional microphone; (b) cross-section view of the microphone head; (c) photograph of the as-prepared bionic directional microphone[65]
Fig. 10. Physical diagram of coupled single-channel and double-channel semi-buried optical waveguide cavities[21]
Fig. 11. Schematic of novel photo-acoustic sensor based on a polymer spherical microcavity fiber-optic Fizeau interferometer[73]
Fig. 12. Optical fiber acoustic sensor based on planar concave polymer micro-resonant cavity. (a) Schematic diagram; (b) optical fiber micro-resonator sensor structure[6]
Fig. 13. FPE type filmless optical microphone. (a) Sensing schematic diagram; (b) sound pressure sensitivity curve[76]
Fig. 14. Experiment on sound pressure sensitive mechanism. (a) Profile of FPE on plane A-A; (b) mechanical structure drawing of FPE; (c) detection principle of acoustic detection structure[78]
Fig. 15. Micro-fiber-optic acoustic sensor based on high quality factor FPR. (a) Physical picture; (b) sensor head size diagram[22]
Fig. 16. Optical contact process of FPR[22]
Fig. 17. High temperature resistance test system of all-optical membrane-free fiber-optic acoustic sensor[80]
Fig. 18. Fiber F-P cavity based on silica glass direct bonding. (a) Bath "sandwich" F-P cavity; (b) image of fiber-optic acoustic sensor[81]
Fig. 19. Optical resolution photoacoustic microscopy images of mouse ears obtained in vivo[6]
Fig. 20. Photographs of physical models. (a) Ridge-like bulk; (b) misplaced rectangular bulk[83]
Fig. 21. Images of two physical models. (a) Ridge-like bulk; (b) misplaced rectangular bulk[83]
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