Yongqiu Zheng, Jiamin Chen, Xinyu Zhao, Jiandong Bai, Liyun Wu, Chenyang Xue. MEMS Optical Acoustic Sensor[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312017

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- Laser & Optoelectronics Progress
- Vol. 60, Issue 3, 0312017 (2023)
Abstract

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