Rongxin Geng, Hao Li, Jia Huang, Peng Hu, You Xiao, Huiqin Yu, Lixing You. Self-Aligned Superconducting Nanowire Single Photon Detector[J]. Laser & Optoelectronics Progress, 2021, 58(10): 1011022
- Laser & Optoelectronics Progress
- Vol. 58, Issue 10, 1011022 (2021)
Fig. 1. SEM image of nanowire structure
Fig. 2. SEM image of sidewall etched by deep silicon
Fig. 3. Self-aligned SNSPD chip. (a) Tape-out product of self-aligned device; (b) model of single chip
Fig. 4. Photograph of self-aligned SNSPD
Fig. 5. Deviation of light spot relative to center of photosensitive area of device
Fig. 6. Schematic diagram of SNSPD test system
Fig. 7. Variation curves of SDE and DCR with bias current
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Table 1. Experimental results under the condition of repeated temperature rise and fall
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Table 2. Experiment results under the condition of repeated insertion and extraction of optical fibers
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