1State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China
2Center for Excellence in Superconducting Electronics, Chinese Academy of Sciences, Shanghai, 200050, China
3University of Chinese Academy of Sciences, Beijing, 100049, China
4Key Laboratory of Space Active Opto-Electronics Technology,Chinese Academy of Sciences, Shanghai, 200050, China