• Laser & Optoelectronics Progress
  • Vol. 58, Issue 7, 0712002 (2021)
Xiaoting Guo**, Xiaojun Liu, Zili Lei, Wenjun Yang, and Long Xu*
Author Affiliations
  • School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan , Hubei 430074, China
  • show less
    DOI: 10.3788/LOP202158.0712002 Cite this Article Set citation alerts
    Xiaoting Guo, Xiaojun Liu, Zili Lei, Wenjun Yang, Long Xu. Improved Least Common Multiple Effective Wavelength Method Used in Dual-Wavelength Interferometry[J]. Laser & Optoelectronics Progress, 2021, 58(7): 0712002 Copy Citation Text show less
    References

    [1] Wyant J C. Testing aspherics using two-wavelength holography[J]. Applied Optics, 10, 2113-2118(1971).

    [2] Polhemus C. Two-wavelength interferometry[J]. Applied Optics, 12, 2071-2074(1973).

    [3] Cheng Y Y, Wyant J C. Two-wavelength phase shifting interferometry[J]. Applied Optics, 23, 4539-4543(1984).

    [4] Creath K. Step height measurement using two-wavelength phase-shifting interferometry[J]. Applied Optics, 26, 2810-2816(1987).

    [5] de Groot P, Kishner S. Synthetic wavelength stabilization for two-color laser-diode interferometry[J]. Applied Optics, 30, 4026-4033(1991).

    [6] Deck L, Demarest F. Two-color light-emitting-diode source for high-precision phase-shifting interferometry[J]. Optics Letters, 18, 1899-1901(1993).

    [7] Onodera R, Ishii Y. Two-wavelength interferometry that uses a Fourier-transform method[J]. Applied Optics, 37, 7988-7994(1998).

    [8] Parshall D, Kim M K. Digital holographic microscopy with dual-wavelength phase unwrapping[J]. Applied Optics, 45, 451-459(2006).

    [9] Kumar U P, Bhaduri B, Kothiyal M P et al. Two-wavelength micro-interferometry for 3-D surface profiling[J]. Optics and Lasers in Engineering, 47, 223-229(2009).

    [10] Rinehart M T, Shaked N T, Jenness N J et al. Simultaneous two-wavelength transmission quantitative phase microscopy with a color camera[J]. Optics Letters, 35, 2612-2614(2010).

    [11] Khmaladze A, Matz R L, Zhang C et al. Dual-wavelength linear regression phase unwrapping in three-dimensional microscopic images of cancer cells[J]. Optics Letters, 36, 912-914(2011).

    [12] Zhang W P, Lu X X, Fei L H et al. Simultaneous phase-shifting dual-wavelength interferometry based on two-step demodulation algorithm[J]. Optics Letters, 39, 5375-5378(2014).

    [13] Safrani A, Abdulhalim I. High-speed 3D imaging using two-wavelength parallel-phase-shift interferometry[J]. Optics Letters, 40, 4651-4654(2015).

    [14] Li J S, Lu X X, Xu X F et al. Simultaneous phase-shifting dual-wavelength interferometry based on independent component analysis[J]. Applied Optics, 56, 3673-3678(2017).

    [15] Wang M M, Zhou C L, Si S C et al. Extended depth-range dual-wavelength interferometry based on iterative two-step temporal phase-unwrapping[J]. Journal of Modern Optics, 65, 287-297(2018).

    [16] Yang G M[M]. Multi wavelength surface topography measurement system based on Linnik and its software design(2018).

    [17] Tian X B, Tu X Z, Zhang J C et al. Snapshot multi-wavelength interference microscope[J]. Optics Express, 26, 18279-18291(2018).

    [18] Cheng J L. Research on the technology for the high precision testing of three-dimensional shape with steps by dual-wavelength phase-shift interferometry[D](2018).

    [19] Hosseini P, Jin D, Yaqoob Z et al. Single-shot dual-wavelength interferometric microscopy[J]. Methods, 136, 35-39(2018).

    [20] Tian X, Tu X, Della Croce K et al. Multi-wavelength quantitative polarization and phase microscope[J]. Biomedical Optics Express, 10, 1638-1648(2019).

    [21] Liu Q, Li L L, Zhang H et al. Simultaneous dual-wavelength phase-shifting interferometry for surface topography measurement[J]. Optics and Lasers in Engineering, 124, 105813(2020).

    [22] Huang J J[M]. Study on multiple wavelength interferometry for surface topography with optical phase shift(2020).

    [23] Zhai Z S, Huang J J, Zhao H et al. Intensity consistency control method for multi-wavelength micro-interferometry[J]. Laser & Optoelectronics Progress, 57, 031202(2020).

    [24] de Groot P J. Extending the unambiguous range of two-color interferometers[J]. Applied Optics, 33, 5948-5953(1994).

    [25] van Brug H, Klaver R G. On the effective wavelength in two-wavelength interferometry[J]. Pure and Applied Optics: Journal of the European Optical Society Part A, 7, 1465-1471(1998).

    [26] Towers C E, Towers D P, Jones J D C. Generalized frequency selection in multifrequency interferometry[J]. Optics Letters, 29, 1348-1350(2004).

    [27] Houairi K, Cassaing F. Two-wavelength interferometry: extended range and accurate optical path difference analytical estimator[J]. Journal of the Optical Society of America A, 26, 2503-2511(2009).

    [28] Falaggis K, Towers D P, Towers C E. Multiwavelength interferometry: extended range metrology[J]. Optics Letters, 34, 950-952(2009).

    [29] Falaggis K, Towers D P, Towers C E. Method of excess fractions with application to absolute distance metrology: analytical solution[J]. Applied Optics, 52, 5758-5765(2013).

    [30] Falaggis K, Towers D P, Towers C E. Algebraic solution for phase unwrapping problems in multiwavelength interferometry[J]. Applied Optics, 53, 3737-3747(2014).

    [31] Guo X T, Liu X J, Lei Z L et al. Unambiguous measurement range and error tolerance in dual-wavelength interferometry[J]. Applied Optics, 59, 9272-9278(2020).

    [32] Guo X T, Liu X J, Yang W J et al. Correction of errors due to uneven intensity distribution and inaccurate phase shifts in prism-based simultaneous phase-shifting interferometry[J]. Applied Optics, 58, 1327-1335(2019).

    Xiaoting Guo, Xiaojun Liu, Zili Lei, Wenjun Yang, Long Xu. Improved Least Common Multiple Effective Wavelength Method Used in Dual-Wavelength Interferometry[J]. Laser & Optoelectronics Progress, 2021, 58(7): 0712002
    Download Citation