Xiaoting Guo, Xiaojun Liu, Zili Lei, Wenjun Yang, Long Xu. Improved Least Common Multiple Effective Wavelength Method Used in Dual-Wavelength Interferometry[J]. Laser & Optoelectronics Progress, 2021, 58(7): 0712002
- Laser & Optoelectronics Progress
- Vol. 58, Issue 7, 0712002 (2021)
Fig. 1. Wrapped phase trajectories for dual-wavelength interference
Fig. 2. Principle diagram of geometric height positioning algorithm
Fig. 3. Profile of groove to be measured
Fig. 4. Multi-wavelength simultaneous phase shifting micro-interferometer. (a) Principle diagram; (b) physical picture; (c) color interferogram (red and green lights)
Fig. 5. Measurement results of 1.2 μm metal single groove pattern by different methods
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Table 1. Computational performance comparison between look-up table method and proposed method
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