• Journal of Semiconductors
  • Vol. 43, Issue 7, 072801 (2022)
Yunqi Li1, Xinwei Wang2, Ning Zhang2、*, Xuecheng Wei2, and Junxi Wang2
Author Affiliations
  • 1Institute of First Medical Center, Chinese PLA General Hospital, Beijing 100853, China
  • 2State Key Laboratory of Solid-State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
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    DOI: 10.1088/1674-4926/43/7/072801 Cite this Article
    Yunqi Li, Xinwei Wang, Ning Zhang, Xuecheng Wei, Junxi Wang. Improving the incorporation of indium component for InGaN-based green LED through inserting photonic crystalline in the GaN layer[J]. Journal of Semiconductors, 2022, 43(7): 072801 Copy Citation Text show less
    (Color online) Schematic of the fabrication process flow to realize Ph-C sample.
    Fig. 1. (Color online) Schematic of the fabrication process flow to realize Ph-C sample.
    The cross-sectional scanning electron microscope of the Ph-C sample.
    Fig. 2. The cross-sectional scanning electron microscope of the Ph-C sample.
    (Color online) Atomic force microscopes surface topography of (a) control sample, (b) Ph-C sample, (c) control sample after KOH etching, (d) Ph-C sample after KOH etching.
    Fig. 3. (Color online) Atomic force microscopes surface topography of (a) control sample, (b) Ph-C sample, (c) control sample after KOH etching, (d) Ph-C sample after KOH etching.
    (Color online) Raman spectra of control sample and Ph-C sample measured at room temperature.
    Fig. 4. (Color online) Raman spectra of control sample and Ph-C sample measured at room temperature.
    (Color online) (a) HRXRD 2θ–ω patterns of the two LED samples. (b) HRXRD (002) rocking curves of the Ph-C sample and the control samples. (c) HRXRD (102) rocking curves of the Ph-C sample and the control samples.
    Fig. 5. (Color online) (a) HRXRD 2θω patterns of the two LED samples. (b) HRXRD (002) rocking curves of the Ph-C sample and the control samples. (c) HRXRD (102) rocking curves of the Ph-C sample and the control samples.
    (Color online) (a) PL spectra of compared LED and Ph-C LED measured at room temperature. (b) EQE of compared LED and Ph-C LED measured under different injection currents. (c) LOP of compared LED and Ph-C LED measured under different injection currents.
    Fig. 6. (Color online) (a) PL spectra of compared LED and Ph-C LED measured at room temperature. (b) EQE of compared LED and Ph-C LED measured under different injection currents. (c) LOP of compared LED and Ph-C LED measured under different injection currents.
    Yunqi Li, Xinwei Wang, Ning Zhang, Xuecheng Wei, Junxi Wang. Improving the incorporation of indium component for InGaN-based green LED through inserting photonic crystalline in the GaN layer[J]. Journal of Semiconductors, 2022, 43(7): 072801
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