• Laser & Optoelectronics Progress
  • Vol. 55, Issue 11, 111201 (2018)
Guoming Fang1、2、3、**, Qi Peng1、2、*, Haotong Ma1、2, Shan Qiao1、2、3, Jiang Bian2, Feng Chen1、2、3, Xincheng Liu1、2、3, Yufeng Tan1、2、3, Bi He1、2、3, and Li Dong1、2、3
Author Affiliations
  • 1 Key Laboratory of Optical Engineering, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 2 Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 3 University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.3788/LOP55.111201 Cite this Article Set citation alerts
    Guoming Fang, Qi Peng, Haotong Ma, Shan Qiao, Jiang Bian, Feng Chen, Xincheng Liu, Yufeng Tan, Bi He, Li Dong. Three-Degree-of-Freedom Measurement Method Based on Plane Normal Vector[J]. Laser & Optoelectronics Progress, 2018, 55(11): 111201 Copy Citation Text show less
    Schematic of 3-DOF measurement principle
    Fig. 1. Schematic of 3-DOF measurement principle
    Error analysis. (a) Position error; (b) parallelism error
    Fig. 2. Error analysis. (a) Position error; (b) parallelism error
    Angle values after 3-DOF simulation. (a) Angle α; (b) angle γ
    Fig. 3. Angle values after 3-DOF simulation. (a) Angle α; (b) angle γ
    Displacement values after 3-DOF simulation
    Fig. 4. Displacement values after 3-DOF simulation
    Experimental device. (a) Schematic; (b) physical map
    Fig. 5. Experimental device. (a) Schematic; (b) physical map
    Experimental results of angle. (a) Angle α in 2-DOF experiment; (b) real-time waveform of γ in 2-DOF experiment; (c) angle α in 3-DOF experiment; (d) angle γ in 3-DOF experiment
    Fig. 6. Experimental results of angle. (a) Angle α in 2-DOF experiment; (b) real-time waveform of γ in 2-DOF experiment; (c) angle α in 3-DOF experiment; (d) angle γ in 3-DOF experiment
    Experimental results of displacement. (a) 2-DOF experiment; (b) 3-DOF experiment
    Fig. 7. Experimental results of displacement. (a) 2-DOF experiment; (b) 3-DOF experiment
    Variable-bcα
    Ranges>0>0arcsin (s)
    <0>0π-arcsin (|s|)
    <0<0π+arcsin (|s|)
    >0<0-arcsin (|s|)
    >0=00
    <0=0π
    =0>0π/2
    =0<0-π/2
    Table 1. Analysis results of angle α0
    Variableα|α|Results ofangle α
    Determinationcondition<0>1α
    >0>1α
    Othersα
    Table 2. Fixed difference value removal of angle α
    PointPositionaldeviation /μmParallelism /(″)
    XZVerticalHorizontal
    A1.003.0071.2877.76
    B4.001.50-71.2858.32
    C2.201.8084.24-51.84
    Table 3. Positional deviations of measuring points in simulation process
    Guoming Fang, Qi Peng, Haotong Ma, Shan Qiao, Jiang Bian, Feng Chen, Xincheng Liu, Yufeng Tan, Bi He, Li Dong. Three-Degree-of-Freedom Measurement Method Based on Plane Normal Vector[J]. Laser & Optoelectronics Progress, 2018, 55(11): 111201
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