• Laser & Optoelectronics Progress
  • Vol. 55, Issue 11, 111201 (2018)
Guoming Fang1、2、3、**, Qi Peng1、2、*, Haotong Ma1、2, Shan Qiao1、2、3, Jiang Bian2, Feng Chen1、2、3, Xincheng Liu1、2、3, Yufeng Tan1、2、3, Bi He1、2、3, and Li Dong1、2、3
Author Affiliations
  • 1 Key Laboratory of Optical Engineering, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 2 Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 3 University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.3788/LOP55.111201 Cite this Article Set citation alerts
    Guoming Fang, Qi Peng, Haotong Ma, Shan Qiao, Jiang Bian, Feng Chen, Xincheng Liu, Yufeng Tan, Bi He, Li Dong. Three-Degree-of-Freedom Measurement Method Based on Plane Normal Vector[J]. Laser & Optoelectronics Progress, 2018, 55(11): 111201 Copy Citation Text show less

    Abstract

    The phase modulator is a key component of the beam synthesis unit in the coherent synthetic aperture telescope, and the accurate measurement of the motion information of the phase modulator is one of the key technologies for phase modulator control. The three-degree-of-freedom (pitch, azimuth, and piston displacement) measurement method based on the plane normal vector is proposed. The angle and displacement information are solved according to the change of the normal vector. The proposed method is described in detail and all the factors influencing measurement accuracy are analyzed. The experimental results show that the displacement range is 0-3 μm when the rotation ranges of the rotation angles α and γ are 0-0.44 mrad and 0-0.28 mrad, respectively. Within the measurement range, the angle error is less than 3.3 μrad and the displacement error is less than 50 nm. The proposed method has the advantages of simple structure, high measurement accuracy, and so on, which can be widely applied in the three-degree-of-freedom measurement of phase modulators and others.
    Guoming Fang, Qi Peng, Haotong Ma, Shan Qiao, Jiang Bian, Feng Chen, Xincheng Liu, Yufeng Tan, Bi He, Li Dong. Three-Degree-of-Freedom Measurement Method Based on Plane Normal Vector[J]. Laser & Optoelectronics Progress, 2018, 55(11): 111201
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