Discharge-Pumped Excimer Laser Technologies and Applications

Xu Liang; Qihui Shen; Jingzhen Shao; Ying Lin

doi:10.3788/LOP221521

Journals >Laser & Optoelectronics Progress >Volume 60 >Issue 19 >Page 1900006 > Article

Laser & Optoelectronics Progress
Vol. 60, Issue 19, 1900006 (2023)

Discharge-Pumped Excimer Laser Technologies and Applications

Xu Liang^1、*, Qihui Shen^1、2, Jingzhen Shao¹, and Ying Lin¹

Author Affiliations

¹Anhui Institute of Optics and Fine Mechanics, Hefei Institute of Physical Science, Chinese Academy of Sciences, Hefei 230031, Anhui , China

²University of Science and Technology of China, Hefei 230026, Anhui ,China

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DOI: 10.3788/LOP221521 Cite this Article Set citation alerts

Xu Liang, Qihui Shen, Jingzhen Shao, Ying Lin. Discharge-Pumped Excimer Laser Technologies and Applications[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1900006 Copy Citation Text

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Xu Liang, Qihui Shen, Jingzhen Shao, Ying Lin. Discharge-Pumped Excimer Laser Technologies and Applications[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1900006

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