Nanosecond laser-induced controllable periodical surface structures on silicon

Lei Chen; Zelin Liu; Chuan Guo; Tongcheng Yu; Minsun Chen; Zhongjie Xu; Hao Liu; Guomin Zhao; Kai Han

doi:10.3788/COL202220.013802

Journals >Chinese Optics Letters >Volume 20 >Issue 1 >Page 013802 > Article

Chinese Optics Letters
Vol. 20, Issue 1, 013802 (2022)

Nanosecond laser-induced controllable periodical surface structures on silicon

Lei Chen¹, Zelin Liu¹, Chuan Guo^1、2、*, Tongcheng Yu^1、2, Minsun Chen^1、2, Zhongjie Xu^1、2, Hao Liu^1、2, Guomin Zhao^1、2, and Kai Han^1、3、**

Author Affiliations

¹College of Advanced Interdisciplinary Studies, National University of Defense Technology, Changsha 410073, China

²Hunan Provincial Key Laboratory of High Energy Laser Technology, Changsha 410073, China

³State Key Laboratory of Pulsed Power Laser Technology, Hefei 230037, China

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DOI: 10.3788/COL202220.013802 Cite this Article Set citation alerts

Lei Chen, Zelin Liu, Chuan Guo, Tongcheng Yu, Minsun Chen, Zhongjie Xu, Hao Liu, Guomin Zhao, Kai Han. Nanosecond laser-induced controllable periodical surface structures on silicon[J]. Chinese Optics Letters, 2022, 20(1): 013802 Copy Citation Text

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