Ren-De CHEN, Peng GUO, Xiao ZUO, Shi-Peng XU, Pei-Ling KE, Ai-Ying WANG. Ag Doped Amorphous Carbon Films: Structure, Mechanical and Electrical Behaviors [J]. Journal of Inorganic Materials, 2019, 34(4): 387
- Journal of Inorganic Materials
- Vol. 34, Issue 4, 387 (2019)
1. Typical XPS spectra for the a-C:Ag films (a), and representative Ag 3d spectra of the films with 41.4at% Ag (b)
2. XRD patterns of a-C:Ag films with various Ag concentrations
3. (a) Sample for TEM prepared by FIB, (b) HRTEM and SAED of sample with 1.2at% a-C:Ag
4. Typical Raman spectra a-C:Ag films with different Ag concentrations (a) and the fitting result of a-C:Ag film with 0.7at% Ag atoms (b)
5. Surface topographies of a-C:Ag films with different Ag concentrations
6. Hardness (a) and elastic modulus (b) as a function of Ag concentration
7. Residual compressive stress of a-C:Ag films as a function of Ag concentration
8. Temperature dependence of resistivity in a-C:Ag film with 37.8at% Ag in the range of 8~400 K (a) and the a-C:Ag with 41.4at% Ag in the range of 2~400 K (b)
9. Plot of lnρ vs reciprocal temperature in the range of 164-400 K for a-C:Ag film with 41.4at% Ag
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Table 1. Ag concentration, O concentration, film thickness and average deposition rate varied with sputtering current and power
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Table 2. The fitted G-peak position, I D/I G and FWHM of G-peak varied with different Ag concentrations
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