Lufeng Liao, Sikun Li, Zinan Zhang, Xiangzhao Wang. Research on Source and Mask Optimization[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922010
- Laser & Optoelectronics Progress
- Vol. 59, Issue 9, 0922010 (2022)
Fig. 1. Schematic diagram of SMO flow
![Workflow of clustering-based critical pattern selection method for SMO[30]](/richHtml/lop/2022/59/9/0922010/img_02.jpg)
Fig. 2. Workflow of clustering-based critical pattern selection method for SMO[30]
![Schematic diagram of main frequencies [19, 22]](/Images/icon/loading.gif){kind=icon}
Fig. 4. Comparison of process windows based on different critical pattern selection methods[19]
Fig. 5. Flow chart of the critical pattern selection[25]
Fig. 6. Common source representation methods in optical lithography[56]
Fig. 7. First 21 Zernike polynomial functions chosen to represent the source patterns[56]
Fig. 8. Schematic diagram of multi-pole light source. (a) Multipole source representation; (b) cartesian discretization of the multipole source[7]
Fig. 9. Schematic of the synthesized source[21]
Fig. 10. Schematic of SO strategies. (a) Position optimization; (b) light source intensity optimization [23]
Fig. 11. Schematic of mask based on polygon representation[47]
Fig. 12. Schematic of pixelated mask[18]
Fig. 13. Schematic diagram of mask encoding[15]
Fig. 14. Schematic diagram of dual edge evolution strategy[23]
Fig. 15. Optimization procedure of SMO based on conjugate gradient method[51]
Fig. 16. Optimization results of SMO based on conjugate gradient method[51]
Fig. 17. Flow chart of SMO based on stochastic parallel gradient descent algorithm[11]
Fig. 18. Flow chart of GA-SMO[47]
Fig. 19. Aerial images, resist images without dose error and resist images under dose error after optimization. (a) Weighted fitness method; (b) dynamic fitness method[17]
Fig. 20. Flow chart of source mask optimization method based on multi chromosome genetic algorithm[18]
Fig. 22. Results of SMO using different optimization algorithms[21]
Fig. 23. SMO convergence curve based on different optimization algorithms[24]
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