• Infrared and Laser Engineering
  • Vol. 49, Issue 3, 0303014 (2020)
Yingjie Yu1, Lin Chang1、*, Ketao Yan1, Weiwei Zheng1, Qulei Xu1, Chen Wang1, and Tao Sun2
Author Affiliations
  • 1School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200444, China
  • 2Shanghai Pudong Development Bank, Shanghai 200002, China
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    DOI: 10.3788/IRLA202049.0303014 Cite this Article
    Yingjie Yu, Lin Chang, Ketao Yan, Weiwei Zheng, Qulei Xu, Chen Wang, Tao Sun. Information separation of multi-surface based on wavelength phase-shifting interferometry[J]. Infrared and Laser Engineering, 2020, 49(3): 0303014 Copy Citation Text show less
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    [2] K G Larkin, B F Oreb. Design and assessment of symmetrical phase-shifting algorithms. Journal of the Optical Society of America A, 9, 1740-1748(1992).

    [3] S Chatterjee. Noncontact thickness measurement of plane-parallel transparent plates with a lateral shearing interferometer. Optical Engineering, 46, 035602(2007).

    [4] Y P Kumar, S Chatterjee. Simultaneous determination of refractive index and thickness of moderately thick plane-parallel transparent glass plates using cyclic path optical configuration setup and a lateral shearing interferometer. Applied Optics, 51, 3533(2012).

    [5] Y Kim, K Hibino, N Sugita. Simultaneous measurement of surface shape and optical thickness using wavelength tuning and a polynomial window function. Optics Express, 23, 32869-32880(2015).

    [6] T Sun, W Zheng, Y Yu. Determination of surface profiles of transparent plates by means of laser interferometry with wavelength tuning. Optics and Lasers in Engineering, 115, 59-66(2019).

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    [8] Y Kim, K Hibino, T Kizaki. Simultaneous interferometric measurement of the absolute thickness and surface shape of a transparent plate using wavelength tuning Fourier analysis and phase shifting. Precision Engineering, 48, 347-351(2017).

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    [11] Sun T, Yu Y, Dong Y, et al. Calibration of tunable diode laser wavelength based on energy centrobaric crection method f discrete spectrum[C]Proc of SPIE, 2018, 10827:108270K.

    [12] J Pontus, A Göran, K Magnus. Suppression of phase error in differential phase-shift keying data by amplitude regeneration. Optics Letters, 31, 1385-1387(2006).

    [13] P D Groot. Measurement of transparent plates with wavelength-tuned phase-shifting interferometry. Applied Optics, 39, 2658-2663(2000).

    [14] Yingjie Yu, Liuxing Sun. Parameter determination method of weighted multi-step wavelength phase-shifting algorithm. Astrometry, 23, 1-8(2003).

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    [2] Zhiyao Ma, Lei Chen, Donghui Zheng, Haiying Ma, Ruokun Li, Chen Huang, Chenhui Hu. System error calibration for Φ300 mm vertical Fizeau interferometer based on liquid reference[J]. Infrared and Laser Engineering, 2022, 51(2): 20210880

    Yingjie Yu, Lin Chang, Ketao Yan, Weiwei Zheng, Qulei Xu, Chen Wang, Tao Sun. Information separation of multi-surface based on wavelength phase-shifting interferometry[J]. Infrared and Laser Engineering, 2020, 49(3): 0303014
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