• Infrared and Laser Engineering
  • Vol. 49, Issue 3, 0303014 (2020)
Yingjie Yu1, Lin Chang1、*, Ketao Yan1, Weiwei Zheng1, Qulei Xu1, Chen Wang1, and Tao Sun2
Author Affiliations
  • 1School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200444, China
  • 2Shanghai Pudong Development Bank, Shanghai 200002, China
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    DOI: 10.3788/IRLA202049.0303014 Cite this Article
    Yingjie Yu, Lin Chang, Ketao Yan, Weiwei Zheng, Qulei Xu, Chen Wang, Tao Sun. Information separation of multi-surface based on wavelength phase-shifting interferometry[J]. Infrared and Laser Engineering, 2020, 49(3): 0303014 Copy Citation Text show less

    Abstract

    The simultaneous non-contact measurement of the front and rear surfaces of parallel plates by using wavelength phase-shifting interference technology was of great significance in the field of optical determination. A time-domain weighting algorithm was proposed to solve the overlapping interference signals of the front and rear surfaces of parallel plates: weighted 36-step sampling algorithm. Firstly, based on the principle and constraints of the algorithm, the basic distribution parameters of the weighted multi-step sampling algorithm were designed, and then the sampling weights of the interference signals of front surface, rear surface and thickness variance were obtained. Through the calculation of the basic distribution parameters, the sampling weight of each surface can be obtained, and the initial phase distribution of each interference information can be obtained by using the weight operation. Based on Zernike polynomials, the simulation of multi-surface interference phase solution was carried out, and the maximum error between the simulation result and the true value was not more than 0.06 nm. In addition, the influence of various errors on the measurement results was analyzed. A parallel plate with a thickness of 20 mm has been measured. The experiment verifies the effectiveness of the algorithm in the actual measurement process.
    Yingjie Yu, Lin Chang, Ketao Yan, Weiwei Zheng, Qulei Xu, Chen Wang, Tao Sun. Information separation of multi-surface based on wavelength phase-shifting interferometry[J]. Infrared and Laser Engineering, 2020, 49(3): 0303014
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