Yingjie Yu, Lin Chang, Ketao Yan, Weiwei Zheng, Qulei Xu, Chen Wang, Tao Sun. Information separation of multi-surface based on wavelength phase-shifting interferometry[J]. Infrared and Laser Engineering, 2020, 49(3): 0303014
- Infrared and Laser Engineering
- Vol. 49, Issue 3, 0303014 (2020)
Fig. 1. Reflection path diagram of interference beam
Fig. 2. Hanning window evaluation function
Fig. 3. Weighted 36-steps sampling evaluation function
Fig. 4. Wrapped phase of 36-steps weighted sampling algorithm
Fig. 5. Residual errors of 36-steps weighted sampling algorithm
Fig. 6. RMS results under the errors of cavity length and thickness
Fig. 7. RMS results under different wavelength errors
Fig. 8. Schematic diagram of wavelength phase-shifting interferometer
Fig. 9. Weighted 36-steps phase-shifting interference test experiment
Fig. 10. Initial interferogram and weighted multi-step results
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Table 1. Value of simulation parameters
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Table 2. Frequency ratio distribution when M = 2
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