Tong Li, Nan Wang, Wanqian Zhu, Zhongmin Xu, Limin Jin, Xiaohao Dong, Song Xue. Finite Element Analysis of Compensation of Surface Shape Accuracy of Piezoelectric Bimorph Mirror[J]. Acta Optica Sinica, 2022, 42(7): 0734001
- Acta Optica Sinica
- Vol. 42, Issue 7, 0734001 (2022)
Fig. 1. Structure diagram of PBM
Fig. 2. Unit voltage profile of 600 mm long mirror under 18 groups of PZT
Fig. 3. Simplified 3D model diagram
Fig. 4. Diagram of model meshing
Fig. 5. Comparison of simulated surface before and after self-gravity correction
Fig. 6. Comparison of target surface shape and simulation surface shape
Fig. 7. Actual deviation between target surface shape and simulation surface shape
Fig. 8. Thermal load and temperature distribution diagram
Fig. 9. Surface view of mirror before and after thermal deformation correction
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Table 1. Material parameters of PZT-5H
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Table 2. Material properties of simulation analysis
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Table 3. Comparison of parameters before and after gravity correction
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Table 4. Comparison of parameters before and after thermal mutation compensation
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