Finite Element Analysis of Compensation of Surface Shape Accuracy of Piezoelectric Bimorph Mirror

Tong Li; Nan Wang; Wanqian Zhu; Zhongmin Xu; Limin Jin; Xiaohao Dong; Song Xue

doi:10.3788/AOS202242.0734001

Journals >Acta Optica Sinica >Volume 42 >Issue 7 >Page 0734001 > Article

Acta Optica Sinica
Vol. 42, Issue 7, 0734001 (2022)

Finite Element Analysis of Compensation of Surface Shape Accuracy of Piezoelectric Bimorph Mirror

Tong Li^1、2, Nan Wang^1、3, Wanqian Zhu^1、3, Zhongmin Xu^1、3, Limin Jin^1、3, Xiaohao Dong^1、3, and Song Xue^1、3、*

Author Affiliations

¹Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201800, China

²University of Chinese Academy of Sciences, Shanghai 100049, China

³Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, China

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DOI: 10.3788/AOS202242.0734001 Cite this Article Set citation alerts

Tong Li, Nan Wang, Wanqian Zhu, Zhongmin Xu, Limin Jin, Xiaohao Dong, Song Xue. Finite Element Analysis of Compensation of Surface Shape Accuracy of Piezoelectric Bimorph Mirror[J]. Acta Optica Sinica, 2022, 42(7): 0734001 Copy Citation Text

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