• Laser & Optoelectronics Progress
  • Vol. 60, Issue 3, 0312013 (2023)
Guanhao Wu†、*, Liheng Shi1、†, and Erge Li
Author Affiliations
  • State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China
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    DOI: 10.3788/LOP223339 Cite this Article Set citation alerts
    Guanhao Wu, Liheng Shi, Erge Li. Surface Topography Measurement Technology Based on Optical Frequency Comb[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312013 Copy Citation Text show less
    Principle of an optical frequency comb[30], where the carrier-envelope phase is Δϕ=2πf0/frep
    Fig. 1. Principle of an optical frequency comb[30], where the carrier-envelope phase is Δϕ=2πf0/frep
    Venation of optical-frequency-comb-based profilometry
    Fig. 2. Venation of optical-frequency-comb-based profilometry
    Schematic of frequency-comb-referenced scheme of multi-wavelength interferometer[51]
    Fig. 3. Schematic of frequency-comb-referenced scheme of multi-wavelength interferometer[51]
    Time-of-flight (TOF) ranging based on OMPD[44], in the PLL (in the red box), the reference optical frequency comb is used to construct a low-noise RF source, and out-of-loop (in the blue box) is used for TOF ranging
    Fig. 4. Time-of-flight (TOF) ranging based on OMPD[44], in the PLL (in the red box), the reference optical frequency comb is used to construct a low-noise RF source, and out-of-loop (in the blue box) is used for TOF ranging
    Line-scan spectrum-encoded dual-comb interferometry[47]
    Fig. 5. Line-scan spectrum-encoded dual-comb interferometry[47]
    Coherent scanning interference profilometry based on scanning optical frequency comb repetition frequency[77]
    Fig. 6. Coherent scanning interference profilometry based on scanning optical frequency comb repetition frequency[77]
    Principle of surface topography reconstruction by synthetic-wavelength-linked pulse alignment and carrier interference phase[82]
    Fig. 7. Principle of surface topography reconstruction by synthetic-wavelength-linked pulse alignment and carrier interference phase[82]
    Schematic of single pixel optical frequency comb profile measurement system based on DMD[90]
    Fig. 8. Schematic of single pixel optical frequency comb profile measurement system based on DMD[90]
    One-shot three-dimensional imaging by spectral interferometry of a chirped optical frequency comb[42]. (a) Diagram of the experimental setup, in which the optical frequency comb spectrum and autocorrelation curve are shown in the upper left corner; (b) a fiber bundle probe consisting of 190 single-mode fibers is shown on the left, and the spectrum captured by the imaging spectrometer is shown on the right
    Fig. 9. One-shot three-dimensional imaging by spectral interferometry of a chirped optical frequency comb[42]. (a) Diagram of the experimental setup, in which the optical frequency comb spectrum and autocorrelation curve are shown in the upper left corner; (b) a fiber bundle probe consisting of 190 single-mode fibers is shown on the left, and the spectrum captured by the imaging spectrometer is shown on the right
    Principle of dual-comb digital holography[98]
    Fig. 10. Principle of dual-comb digital holography[98]
    Comparison of representative comb-based topography measurement techniques, the test conditions of different works are not uniform
    Fig. 11. Comparison of representative comb-based topography measurement techniques, the test conditions of different works are not uniform
    Guanhao Wu, Liheng Shi, Erge Li. Surface Topography Measurement Technology Based on Optical Frequency Comb[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312013
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