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Journals >
Laser & Optoelectronics Progress >
Volume 60 >
Issue 3 >
Page 0312013 > Article
Laser & Optoelectronics Progress
Vol. 60, Issue 3, 0312013 (2023)
Surface Topography Measurement Technology Based on Optical Frequency Comb
Guanhao Wu
†、*
, Liheng Shi
1、†
, and Erge Li
Author Affiliations
State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China
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DOI:
10.3788/LOP223339
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Guanhao Wu, Liheng Shi, Erge Li. Surface Topography Measurement Technology Based on Optical Frequency Comb[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312013
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Guanhao Wu, Liheng Shi, Erge Li. Surface Topography Measurement Technology Based on Optical Frequency Comb[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312013
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Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Dec. 17, 2022
Accepted: Jan. 6, 2023
Published Online: Feb. 10, 2023
The Author Email: Wu Guanhao (guanhaowu@mail.tsinghua.edu.cn)
DOI:
10.3788/LOP223339
Recommended Topics
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