• Infrared and Laser Engineering
  • Vol. 54, Issue 5, 20250093 (2025)
Wenzhe ZOU1,2, Yuqing GUAN1,2, Chuangwei GUO1,2, Yujie ZHANG1,2..., Liqin LIU1,2, Ruishu XU1,2, Lihua LEI1,2 and Gang LING1,2,*|Show fewer author(s)
Author Affiliations
  • 1Shanghai Institute of Measurement and Testing Technology, Shanghai 201203, China
  • 2Shanghai Key Laboratory of Online Test and Control Technology, Shanghai 201203, China
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    DOI: 10.3788/IRLA20250093 Cite this Article
    Wenzhe ZOU, Yuqing GUAN, Chuangwei GUO, Yujie ZHANG, Liqin LIU, Ruishu XU, Lihua LEI, Gang LING. Attitude calibration method of micro nano grating based on laser interferometer[J]. Infrared and Laser Engineering, 2025, 54(5): 20250093 Copy Citation Text show less
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    Wenzhe ZOU, Yuqing GUAN, Chuangwei GUO, Yujie ZHANG, Liqin LIU, Ruishu XU, Lihua LEI, Gang LING. Attitude calibration method of micro nano grating based on laser interferometer[J]. Infrared and Laser Engineering, 2025, 54(5): 20250093
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