Wenzhe ZOU, Yuqing GUAN, Chuangwei GUO, Yujie ZHANG, Liqin LIU, Ruishu XU, Lihua LEI, Gang LING. Attitude calibration method of micro nano grating based on laser interferometer[J]. Infrared and Laser Engineering, 2025, 54(5): 20250093

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- Infrared and Laser Engineering
- Vol. 54, Issue 5, 20250093 (2025)

Fig. 1. Schematic diagram of the grating displacement measurement system

Fig. 2. Schematic diagram of part of the optical path of the photodetector

Fig. 3. Schematic diagram of the assembly error attitude of the grating and the stage

Fig. 4. Schematic diagram of the uniaxial calibration process

Fig. 5. Physical diagram of the system

Fig. 6. Schematic diagram of the calibration of the photoelectric autocollimator
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Table 1. Measurement results before and after calibration
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Table 2. Accumulated value of rotation angle

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