• Infrared and Laser Engineering
  • Vol. 54, Issue 5, 20250093 (2025)
Wenzhe ZOU1,2, Yuqing GUAN1,2, Chuangwei GUO1,2, Yujie ZHANG1,2..., Liqin LIU1,2, Ruishu XU1,2, Lihua LEI1,2 and Gang LING1,2,*|Show fewer author(s)
Author Affiliations
  • 1Shanghai Institute of Measurement and Testing Technology, Shanghai 201203, China
  • 2Shanghai Key Laboratory of Online Test and Control Technology, Shanghai 201203, China
  • show less
    DOI: 10.3788/IRLA20250093 Cite this Article
    Wenzhe ZOU, Yuqing GUAN, Chuangwei GUO, Yujie ZHANG, Liqin LIU, Ruishu XU, Lihua LEI, Gang LING. Attitude calibration method of micro nano grating based on laser interferometer[J]. Infrared and Laser Engineering, 2025, 54(5): 20250093 Copy Citation Text show less
    Schematic diagram of the grating displacement measurement system
    Fig. 1. Schematic diagram of the grating displacement measurement system
    Schematic diagram of part of the optical path of the photodetector
    Fig. 2. Schematic diagram of part of the optical path of the photodetector
    Schematic diagram of the assembly error attitude of the grating and the stage
    Fig. 3. Schematic diagram of the assembly error attitude of the grating and the stage
    Schematic diagram of the uniaxial calibration process
    Fig. 4. Schematic diagram of the uniaxial calibration process
    Physical diagram of the system
    Fig. 5. Physical diagram of the system
    Schematic diagram of the calibration of the photoelectric autocollimator
    Fig. 6. Schematic diagram of the calibration of the photoelectric autocollimator
    Test number12345
    Indication of the laser interferometer/μm499.9989499.9987499.9992499.9992499.9994
    Indication of the displacement measurement system(before calibration)/μm499.8687498.7625499.4384497.9730499.9608
    Indication of the displacement measurement system(after $ \theta Z $ calibration)/μm499.9898499.1781499.4759499.9926499.9701
    Indication of the displacement measurement system(after $ \theta Y $ calibration)/μm499.9976499.9972499.9977499.9976499.9978
    Indication of the displacement measurement system(after $ \theta X $ calibration)/μm499.9978499.9975499.9973499.9981499.9979
    Indication difference/μm0.00110.00120.00190.00110.0015
    Table 1. Measurement results before and after calibration
    Test serial number12345
    Accumulated rotation angle($ \theta Z $)/(°)1.262.34−0.695.520.33
    Accumulated rotation angle($ \theta Y $)/(°)0.32−3.282.620.28−0.61
    Accumulated rotation angle($ \theta X $)/(°)0.541.33−2.093.78−0.36
    Table 2. Accumulated value of rotation angle
    Wenzhe ZOU, Yuqing GUAN, Chuangwei GUO, Yujie ZHANG, Liqin LIU, Ruishu XU, Lihua LEI, Gang LING. Attitude calibration method of micro nano grating based on laser interferometer[J]. Infrared and Laser Engineering, 2025, 54(5): 20250093
    Download Citation