Micro nano gratings, as subwavelength structural optical benchmarks, are periodic structural optical elements that achieve precise control of light field phase and energy through photolithography, etching, ion implantation, mechanical grinding, polishing, and coating steps. The displacement sensing system constructed based on its diffraction interferometry principle, with grating period as the quantized traceable measurement benchmark, breaks through the limitations of traditional laser interferometers that rely solely on a single wavelength. It combines the anti multimode interference characteristics under complex working conditions, miniaturized embedded integration characteristics, and cross scale compatibility, and has become the core technology for sub nanometer displacement sensing in extreme environments. The urgent need for robustness to multi physical field coupling in opto mechatronic integrated systems has made precise decoupling of error transfer links in micro nano gratings a cutting-edge challenge in the field of ultra precision measurement. Research has shown that when a grating is integrated as an embedded sensing unit in an electromechanical coupling system, its multi degree of freedom pose deviation (roll, pitch, yaw) will cause asymmetric distortion of the diffraction field and nonlinear drift of the interference phase, forming a nanoscale error transmission chain. In recent years, by integrating vector diffraction field reconstruction, quantum phase reference feedback, and multi axis collaborative control theory, the academic community has gradually established a grating displacement table cross scale error collaborative suppression system, providing a theoretical foundation for the paradigm evolution of grating metrology from "static calibration" to "dynamic control". This research direction not only promotes the innovation of the grating manufacturing assembly traceability technology chain, but also opens up a new path for autonomous perception calibration of intelligent equipment at the interdisciplinary level.In order to address the common problem of phase distortion in the diffraction field caused by multidimensional installation errors of micro nano gratings, and to reduce the nanoscale errors caused by position calculation, this paper proposes a new method of pose co-calibration based on the phase modulation characteristics of vector diffraction fields. This article analyzes the causes of pose errors in micro nano gratings, describes the assembly state of one-dimensional gratings relative to displacement tables using the roll, pitch, and yaw angles of one-dimensional gratings, and quantitatively analyzes their error values based on vector diffraction theory. Innovatively constructed a traceable calibration chain based on laser interferometer benchmark, and achieved multi degree of freedom collaborative calibration of grating displacement table through a composite control strategy of extreme value tracking and interferometer indication closed-loop feedback.The grating pose calibration method based on laser interferometer can effectively reduce the pose error of micro nano gratings in the grating displacement measurement system, and is feasible.Through effective calibration during the system construction process, the measurement uncertainty of the calibration method can be effectively controlled, and the introduction of laser interferometers enables traceability of pose calibration for micro nano gratings. The final synthesized uncertainty of this calibration method is 2.17 nm, with a maximum calibration difference of 0.019 μm. The standard deviation of the displacement measurement system after calibration is 0.32 nm. Prove that the method is stable and reliable.This paper proposes a calibration method based on feedback data from laser interferometers to address the problem of grating pose errors in nanodisplacement measurement systems. The method involves single axis correction of the three-axis pose (pitch, roll, yaw) of micro nano gratings. The method achieves multi degree of freedom collaborative calibration between gratings and displacement tables through a composite control strategy of extreme value tracking and interferometer indication closed-loop feedback. In the process of system construction, the calibration of each important link was carried out to reduce the overall system uncertainty, and the effectiveness of this method was verified through experiments. Finally, the measurement uncertainty of this calibration method was analyzed.