• Journal of Semiconductors
  • Vol. 41, Issue 4, 041601 (2020)
Zhong Ma1, Desheng Kong2, Lijia Pan1, and Zhenan Bao3
Author Affiliations
  • 1Collaborative Innovation Center of Advanced Microstructures, School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China
  • 2College of Engineering and Applied Science, Nanjing University, Nanjing 210093, China
  • 3Department of Chemical Engineering, Stanford University, Stanford, CA 94305, USA
  • show less
    DOI: 10.1088/1674-4926/41/4/041601 Cite this Article
    Zhong Ma, Desheng Kong, Lijia Pan, Zhenan Bao. Skin-inspired electronics: emerging semiconductor devices and systems[J]. Journal of Semiconductors, 2020, 41(4): 041601 Copy Citation Text show less
    References

    [1] S Wang, J Y Oh, J Xu et al. Skin-inspired electronics: an emerging paradigm. Acc Chem Res, 51, 1033(2018).

    [2] J C Yang, J Mun, S Y Kwon et al. Electronic skin: recent progress and future prospects for skin-attachable devices for health monitoring, robotics, and prosthetics. Adv Mater, 1904765(2019).

    [3] M L Hammock, A Chortos, B C K Tee et al. The evolution of electronic skin (E-Skin): A brief history, design considerations, and recent progress. Adv Mater, 25, 5997(2013).

    [4] Z Ma, S Li, H Wang et al. Advanced electronic skin devices for healthcare applications. J Mater Chem B, 7, 173(2019).

    [5] L Wang, D Chen, K Jiang et al. New insights and perspectives into biological materials for flexible electronics. Chem Soc Rev, 46, 6764(2017).

    [6] T Li, Y Li, T Zhang. Materials, structures, and functions for flexible and stretchable biomimetic sensors. Acc Chem Res, 52, 288(2019).

    [7] Y Liu, K He, G Chen et al. Nature-inspired structural materials for flexible electronic devices. Chem Rev, 117, 12893(2017).

    [8] K Wang, Z Lou, L Wang et al. Bioinspired interlocked structure-induced high deformability for two-dimensional titanium carbide (MXene)/natural microcapsule-based flexible pressure sensors. ACS Nano, 13, 9139(2019).

    [9] A Chortos, J Liu, Z Bao. Pursuing prosthetic electronic skin. Nat Mater, 15, 937(2016).

    [10] J Li, Z Ma, H Wang et al. Skin-inspired electronics and its applications in advanced intelligent systems. Adv Intell Syst, 0, 1900063(2019).

    [11] Z Lou, L Wang, G Shen. Recent advances in smart wearable sensing systems. Adv Mater Technol, 3, 1800444(2018).

    [12] S Yao, P Swetha, Y Zhu. Nanomaterial-enabled wearable sensors for healthcare. Adv Healthc Mater, 7, 1700889(2018).

    [13] C Edwards, R Marks. Evaluation of biomechanical properties of human skin. Clin Dermatol, 13, 375(1995).

    [14] Y Liu, M Pharr, G A Salvatore. Lab-on-skin: A review of flexible and stretchable electronics for wearable health monitoring. ACS Nano, 11, 9614(2017).

    [15] D H Kim, N Lu, R Ma et al. Epidermal electronics. Science, 333, 838(2011).

    [16] A J Bandodkar, I Jeerapan, J M You et al. Highly stretchable fully-printed CNT-based electrochemical sensors and biofuel cells: combining intrinsic and design-induced stretchability. Nano Lett, 16, 721(2016).

    [17] T C Shyu, P F Damasceno, P M Dodd et al. A kirigami approach to engineering elasticity in nanocomposites through patterned defects. Nat Mater, 14, 785(2015).

    [18] H Vandeparre, Q Liu, I R Minev et al. Localization of folds and cracks in thin metal films coated on flexible elastomer foams. Adv Mater, 25, 3117(2013).

    [19] K Li, X Cheng, F Zhu et al. A generic soft encapsulation strategy for stretchable electronics. Adv Funct Mater, 29, 1806630(2019).

    [20] J Li, E Song, C H Chiang et al. Conductively coupled flexible silicon electronic systems for chronic neural electrophysiology. Proc Natl Acad Sci, 115, E9542(2018).

    [21] W Cheng, L Yu, D Kong et al. Fast-response and low-hysteresis flexible pressure sensor based on silicon nanowires. IEEE Electron Device Lett, 39, 1069(2018).

    [22] Y Wang, C Zhu, R Pfattner et al. A highly stretchable, transparent, and conductive polymer. Sci Adv, 3, e1602076(2017).

    [23] R Nur, N Matsuhisa, Z Jiang et al. A highly sensitive capacitive-type strain sensor using wrinkled ultrathin gold films. Nano Lett, 18, 5610(2018).

    [24] C Müller, S Goffri, D W Breiby et al. Tough, semiconducting polyethylene-poly(3-hexylthiophene) diblock copolymers. Adv Funct Mater, 17, 2674(2007).

    [25] B O’Connor, R J Kline, B R Conrad et al. Anisotropic structure and sharge transport in highly strain-aligned regioregular poly(3-hexylthiophene). Adv Funct Mater, 21, 3697(2011).

    [26] G J N Wang, L Shaw, J Xu et al. Inducing elasticity through oligo-siloxane crosslinks for intrinsically stretchable semiconducting polymers. Adv Funct Mater, 26, 7254(2016).

    [27] J Y Oh, S Rondeau-Gagné, Y C Chiu et al. Intrinsically stretchable and healable semiconducting polymer for organic transistors. Nature, 539, 411(2016).

    [28] L Si, M V Massa, K Dalnoki-Veress et al. Chain entanglement in thin freestanding polymer films. Phys Rev Lett, 94, 127801(2005).

    [29] J Xu, S Wang, G J N Wang et al. Highly stretchable polymer semiconductor films through the nanoconfinement effect. Science, 355, 59(2017).

    [30] Y Kim, J Zhu, B Yeom et al. Stretchable nanoparticle conductors with self-organized conductive pathways. Nature, 500, 59(2013).

    [31] T Q Trung, N E Lee. Recent progress on stretchable electronic devices with intrinsically stretchable components. Adv Mater, 29, 1603167(2017).

    [32] Z Ma, W Shi, K Yan et al. Doping engineering of conductive polymer hydrogels and their application in advanced sensor technologies. Chem Sci, 10, 6232(2019).

    [33] E Song, B Kang, H H Choi et al. Stretchable and transparent organic semiconducting thin film with conjugated polymer nanowires embedded in an elastomeric matrix. Adv Electron Mater, 2, 1500250(2016).

    [34] Y Zhang, C J Sheehan, J Zhai et al. Polymer-embedded carbon nanotube ribbons for stretchable conductors. Adv Mater, 22, 3027(2010).

    [35] T Q Trung, S Ramasundaram, B U Hwang et al. An all-elastomeric transparent and stretchable temperature sensor for body-attachable wearable electronics. Adv Mater, 28, 502(2016).

    [36] D J Lipomi, M Vosgueritchian, B C K Tee et al. Skin-like pressure and strain sensors based on transparent elastic films of carbon nanotubes. Nat Nanotechnol, 6, 788(2011).

    [37] J Liang, L Li, D Chen et al. Intrinsically stretchable and transparent thin-film transistors based on printable silver nanowires, carbon nanotubes and an elastomeric dielectric. Nat Commun, 6, 7647(2015).

    [38] S Chen, K Jiang, Z Lou et al. Recent developments in graphene-based tactile sensors and E-skins. Adv Mater Technol, 3, 1700248(2018).

    [39] C Wang, H Wu, Z Chen et al. Self-healing chemistry enables the stable operation of silicon microparticle anodes for high-energy lithium-ion batteries. Nat Chem, 5, 1042(2013).

    [40] A J Bandodkar, V Mohan, C S López et al. Self-healing inks for autonomous repair of printable electrochemical devices. Adv Electron Mater, 1, 1500289(2015).

    [41] T Wang, Y Zhang, Q Liu et al. A self-healable, highly stretchable, and solution processable conductive polymer composite for ultrasensitive strain and pressure sensing. Adv Funct Mater, 28, 1705551(2018).

    [42] W Pu, F Jiang, P Chen et al. A POSS based hydrogel with mechanical robustness, cohesiveness and a rapid self-healing ability by electrostatic interaction. Soft Matter, 13, 5645(2017).

    [43] M Nakahata, Y Takashima, A Harada. Highly flexible, tough, and self-healing supramolecular polymeric materials using host–guest interaction. Macromol Rapid Commun, 37, 86(2016).

    [44] J Kang, D Son, G J N Wang et al. Tough and water-insensitive self-healing elastomer for robust electronic skin. Adv Mater, 30, 1706846(2018).

    [45] G J N Wang, A Gasperini, Z Bao. Stretchable polymer semiconductors for plastic electronics. Adv Electron Mater, 4, 1700429(2018).

    [46] C H Li, C Wang, C Keplinger et al. A highly stretchable autonomous self-healing elastomer. Nat Chem, 8, 618(2016).

    [47] Y Cao, Y J Tan, S Li et al. Self-healing electronic skins for aquatic environments. Nat Electron, 2, 75(2019).

    [48] J Kang, J B H Tok, Z Bao. Self-healing soft electronics. Nat Electron, 2, 144(2019).

    [49] D Son, J Kang, O Vardoulis et al. An integrated self-healable electronic skin system fabricated via dynamic reconstruction of a nanostructured conducting network. Nat Nanotechnol, 13, 1057(2018).

    [50] K Guo, D L Zhang, X M Zhang et al. Conductive elastomers with autonomic self-healing properties. Angew Chem Int Ed, 54, 12127(2015).

    [51] E D’Elia, S Barg, N Ni et al. Self-healing graphene-based composites with sensing capabilities. Adv Mater, 27, 4788(2015).

    [52] X Yan, Z Liu, Q Zhang et al. Quadruple H-bonding cross-linked supramolecular polymeric materials as substrates for stretchable, antitearing, and self-healable thin film electrodes. J Am Chem Soc, 140, 5280(2018).

    [53] B C K Tee, C Wang, R Allen et al. An electrically and mechanically self-healing composite with pressure-and flexion-sensitive properties for electronic skin applications. Nat Nanotechnol, 7, 825(2012).

    [54] M Khatib, T P Huynh, Y Deng et al. A freestanding stretchable and multifunctional transistor with intrinsic self-healing properties of all device components. Small, 15, 1803939(2019).

    [55] T Dvir, B P Timko, M D Brigham et al. Nanowired three-dimensional cardiac patches. Nat Nanotechnol, 6, 720(2011).

    [56] C J Bettinger, Z Bao. Organic thin-film transistors fabricated on resorbable biomaterial substrates. Adv Mater, 22, 651(2010).

    [57] G A Salvatore, J Sülzle, Valle F Dalla et al. Biodegradable and highly deformable temperature sensors for the internet of things. Adv Funct Mater, 27, 1702390(2017).

    [58] S W Hwang, G Park, H Cheng et al. Materials for high-performance biodegradable semiconductor devices. Adv Mater, 26, 1992(2014).

    [59] D Lu, T L Liu, J K Chang et al. Transient light-emitting diodes constructed from semiconductors and transparent conductors that biodegrade under physiological conditions. Adv Mater, 31, 1902739(2019).

    [60] S W Hwang, H Tao, D H Kim et al. A physically transient form of silicon electronics. Science, 337, 1640(2012).

    [61] S W Hwang, C H Lee, H Cheng et al. Biodegradable elastomers and silicon nanomembranes/nanoribbons for stretchable, transient electronics, and biosensors. Nano Lett, 15, 2801(2015).

    [62] S W Hwang, X Huang, J H Seo et al. Materials for bioresorbable radio frequency electronics. Adv Mater, 25, 3526(2013).

    [63] S K Kang, R K J Murphy, S W Hwang et al. Bioresorbable silicon electronic sensors for the brain. Nature, 530, 71(2016).

    [64] W Bai, J Shin, R Fu et al. Bioresorbable photonic devices for the spectroscopic characterization of physiological status and neural activity. Nat Biomed Eng, 3, 644(2019).

    [65] J Shin, Z Liu, W Bai et al. Bioresorbable optical sensor systems for monitoring of intracranial pressure and temperature. Sci Adv, 5, eaaw1899(2019).

    [66] T Lei, X Chen, G Pitner et al. Removable and recyclable conjugated polymers for highly selective and high-yield dispersion and release of low-cost carbon nanotubes. J Am Chem Soc, 138, 802(2016).

    [67] M Irimia-Vladu, P A Troshin, M Reisinger et al. Biocompatible and biodegradable materials for organic field-effect transistors. Adv Funct Mater, 20, 4069(2010).

    [68] M Irimia-Vladu, E D Głowacki, P A Troshin et al. Indigo-a natural pigment for high performance ambipolar organic field effect transistors and circuits. Adv Mater, 24, 375(2012).

    [69] L Wang, K Wang, Z Lou et al. Plant-based modular building blocks for “green” electronic skins. Adv Funct Mater, 28, 1804510(2018).

    [70] C Wang, X Li, E Gao et al. Carbonized silk fabric for ultrastretchable, highly sensitive, and wearable strain sensors. Adv Mater, 28, 6640(2016).

    [71] C Wang, K Xia, M Zhang et al. An all-silk-derived dual-mode e-skin for simultaneous temperature–pressure detection. ACS Appl Mater Interfaces, 9, 39484(2017).

    [72] C M Boutry, Y Kaizawa, B C Schroeder et al. A stretchable and biodegradable strain and pressure sensor for orthopaedic application. Nat Electron, 1, 314(2018).

    [73] D Khodagholy, J N Gelinas, T Thesen et al. NeuroGrid: recording action potentials from the surface of the brain. Nat Neurosci, 18, 310(2015).

    [74] T Lei, M Guan, J Liu et al. Biocompatible and totally disintegrable semiconducting polymer for ultrathin and ultralightweight transient electronics. Proc Natl Acad Sci, 114, 5107(2017).

    [75] C M Boutry, L Beker, Y Kaizawa et al. Biodegradable and flexible arterial-pulse sensor for the wireless monitoring of blood flow. Nat Biomed Eng, 3, 47(2019).

    [76] S C B Mannsfeld, B C K Tee, R M Stoltenberg et al. Highly sensitive flexible pressure sensors with microstructured rubber dielectric layers. Nat Mater, 9, 859(2010).

    [77] C M Boutry, M Negre, M Jorda et al. A hierarchically patterned, bioinspired e-skin able to detect the direction of applied pressure for robotics. Sci Robot, 3, eaau6914(2018).

    [78] Z W K Low, Z Li, C Owh et al. Using artificial skin devices as skin replacements: insights into superficial treatment. Small, 15, 1805453(2019).

    [79] C M Boutry, A Nguyen, Q O Lawal et al. A sensitive and biodegradable pressure sensor array for cardiovascular monitoring. Adv Mater, 27, 6954(2015).

    [80] B C K Tee, A Chortos, R R Dunn et al. Tunable flexible pressure sensors using microstructured elastomer geometries for intuitive electronics. Adv Funct Mater, 24, 5427(2014).

    [81] G Y Bae, J T Han, G Lee et al. Pressure/temperature sensing bimodal electronic skin with stimulus discriminability and linear sensitivity. Adv Mater, 30, 1803388(2018).

    [82] Z Wang, S Guo, H Li et al. The semiconductor/conductor interface piezoresistive effect in an organic transistor for highly sensitive pressure sensors. Adv Mater, 31, 1805630(2019).

    [83] S H Cho, S W Lee, S Yu et al. Micropatterned pyramidal ionic gels for sensing broad-range pressures with high sensitivity. ACS Appl Mater Interfaces, 9, 10128(2017).

    [84] G Schwartz, B C K Tee, J Mei et al. Flexible polymer transistors with high pressure sensitivity for application in electronic skin and health monitoring. Nat Commun, 4, 1859(2013).

    [85] W Cheng, J Wang, Z Ma et al. Flexible pressure sensor with high sensitivity and low hysteresis based on a hierarchically microstructured electrode. IEEE Electron Device Lett, 39, 288(2018).

    [86] H H Chou, A Nguyen, A Chortos et al. A chameleon-inspired stretchable electronic skin with interactive colour changing controlled by tactile sensing. Nat Commun, 6, 8011(2015).

    [87] L Pan, A Chortos, G Yu et al. An ultra-sensitive resistive pressure sensor based on hollow-sphere microstructure induced elasticity in conducting polymer film. Nat Commun, 5, 3002(2014).

    [88] G Y Bae, S W Pak, D Kim et al. Linearly and highly pressure-sensitive electronic skin based on a bioinspired hierarchical structural array. Adv Mater, 28, 5300(2016).

    [89] C Pang, G Y Lee, T Kim et al. A flexible and highly sensitive strain-gauge sensor using reversible interlocking of nanofibres. Nat Mater, 11, 795(2012).

    [90] D Kang, P V Pikhitsa, Y W Choi et al. Ultrasensitive mechanical crack-based sensor inspired by the spider sensory system. Nature, 516, 222(2014).

    [91] S S Ranade, R Syeda, A Patapoutian. Mechanically activated ion channels. Neuron, 87, 1162(2015).

    [92] K Schrenk-Siemens, H Wende, V Prato et al. PIEZO2 is required for mechanotransduction in human stem cell–derived touch receptors. Nat Neurosci, 18, 10(2015).

    [93] M L Jin, S Park, Y Lee et al. An ultrasensitive, visco-poroelastic artificial mechanotransducer skin inspired by piezo2 protein in mammalian merkel cells. Adv Mater, 29, 1605973(2017).

    [94] C Y Lee, G W Wu, W J Hsieh. Fabrication of micro sensors on a flexible substrate. Sens Actuators Phys, 147, 173(2008).

    [95] I Y Han, S J Kim. Diode temperature sensor array for measuring micro-scale surface temperatures with high resolution. Sens Actuators Phys, 141, 52(2008).

    [96] R C Webb, A P Bonifas, A Behnaz et al. Ultrathin conformal devices for precise and continuous thermal characterization of human skin. Nat Mater, 12, 938(2013).

    [97] J Jeon, H B Lee, Z Bao. Flexible wireless temperature sensors based on Ni microparticle-filled binary polymer composites. Adv Mater, 25, 850(2013).

    [98] W H Yeo, Y S Kim, J Lee et al. Multifunctional epidermal electronics printed directly onto the skin. Adv Mater, 25, 2773(2013).

    [99] A Chortos, Z Bao. Skin-inspired electronic devices. Mater Today, 17, 321(2014).

    [100] S Zhao, R Zhu. Flexible bimodal sensor for simultaneous and independent perceiving of pressure and temperature stimuli. Adv Mater Technol, 2, 1700183(2017).

    [101] D H Ho, Q Sun, S Y Kim et al. Stretchable and multimodal all graphene electronic skin. Adv Mater, 28, 2601(2016).

    [102] Q Wang, M Jian, C Wang et al. Carbonized silk nanofiber membrane for transparent and sensitive electronic skin. Adv Funct Mater, 27, 1605657(2017).

    [103] W Gao, S Emaminejad, H Y Y Nyein et al. Fully integrated wearable sensor arrays for multiplexed in situ perspiration analysis. Nature, 529, 509(2016).

    [104] R J Sempionatto, T Nakagawa, A Pavinatto et al. Eyeglasses based wireless electrolyte and metabolite sensor platform. Lab Chip, 17, 1834(2017).

    [105] L Wang, Z Lou, K Jiang et al. Bio-multifunctional smart wearable sensors for medical devices. Adv Intell Syst, 0, 1900040(2019).

    [106] T Yokota, T Sekitani, T Tokuhara et al. Sheet-type flexible organic active matrix amplifier system using pseudo-CMOS circuits with floating-gate structure. IEEE Trans Electron Devices, 59, 3434(2012).

    [107] K Ishida, T Huang, K Honda et al. Insole pedometer with piezoelectric energy harvester and 2 V organic circuits. IEEE J Solid-State Circuits, 48, 255(2013).

    [108] X Ji, P Zhou, L Zhong et al. Smart surgical catheter for C-reactive protein sensing based on an imperceptible organic transistor. Adv Sci, 5, 1701053(2018).

    [109] A Chortos, G I Koleilat, R Pfattner et al. Mechanically durable and highly stretchable transistors employing carbon nanotube semiconductor and electrodes. Adv Mater, 28, 4441(2016).

    [110] J Viventi, D H Kim, L Vigeland et al. Flexible, foldable, actively multiplexed, high-density electrode array for mapping brain activity in vivo. Nat Neurosci, 14, 1599(2011).

    [111] D Kong, R Pfattner, A Chortos et al. Capacitance characterization of elastomeric dielectrics for applications in intrinsically stretchable thin film transistors. Adv Funct Mater, 26, 4680(2016).

    [112] A Chortos, J Lim, J W F To et al. Highly stretchable transistors using a microcracked organic semiconductor. Adv Mater, 26, 4253(2014).

    [113] R A Nawrocki, N Matsuhisa, T Yokota et al. 300-nm imperceptible, ultraflexible, and biocompatible e-skin fit with tactile sensors and organic transistors. Adv Electron Mater, 2, 1500452(2016).

    [114] S Lee, A Reuveny, J Reeder et al. A transparent bending-insensitive pressure sensor. Nat Nanotechnol, 11, 472(2016).

    [115] Q Sun, W Seung, B J Kim et al. Active matrix electronic skin strain sensor based on piezopotential-powered graphene transistors. Adv Mater, 27, 3411(2015).

    [116] T Someya, T Sekitani, S Iba et al. A large-area, flexible pressure sensor matrix with organic field-effect transistors for artificial skin applications. Proc Natl Acad Sci, 101, 9966(2004).

    [117] R Pfattner, A M Foudeh, C Liong et al. On the working mechanisms of solid-state double-layer-dielectric-based organic field-effect transistors and their implication for sensors. Adv Electron Mater, 4, 1700326(2018).

    [118] R Pfattner, A M Foudeh, S Chen et al. Dual-gate organic field-effect transistor for pH sensors with tunable sensitivity. Adv Electron Mater, 5, 1800381(2019).

    [119] C Zhu, H C Wu, G Nyikayaramba et al. Intrinsically stretchable temperature sensor based on organic thin-film transistors. IEEE Electron Device Lett, 40, 1630(2019).

    [120] Q Sun, D H Kim, S S Park et al. Transparent, low-power pressure sensor matrix based on coplanar-gate graphene transistors. Adv Mater, 26, 4735(2014).

    [121] T Sekitani, T Yokota, K Kuribara et al. Ultraflexible organic amplifier with biocompatible gel electrodes. Nat Commun, 7, 1(2016).

    [122] A Reuveny, S Lee, T Yokota et al. High-frequency, conformable organic amplifiers. Adv Mater, 28, 3298(2016).

    [123] N Matsuhisa, Y Jiang, Z Liu et al. High-transconductance stretchable transistors achieved by controlled gold microcrack morphology. Adv Electron Mater, 5, 1900347(2019).

    [124] F Molina-Lopez, T Z Gao, U Kraft et al. Inkjet-printed stretchable and low voltage synaptic transistor array. Nat Commun, 10, 1(2019).

    [125] S Wang, J Xu, W Wang et al. Skin electronics from scalable fabrication of an intrinsically stretchable transistor array. Nature, 555, 83(2018).

    [126] M Sugiyama, T Uemura, M Kondo et al. An ultraflexible organic differential amplifier for recording electrocardiograms. Nat Electron, 2, 351(2019).

    [127] H Lee, S Lee, W Lee et al. Ultrathin organic electrochemical transistor with nonvolatile and thin gel electrolyte for long-term electrophysiological monitoring. Adv Funct Mater, 1906982(2019).

    [128] M Uz, K Jackson, M S Donta et al. Fabrication of high-resolution graphene-based flexible electronics via polymer casting. Sci Rep, 9, 10595(2019).

    [129] S C Liu, T Delbruck. Neuromorphic sensory systems. Curr Opin Neurobiol, 20, 288(2010).

    [130] C Zhu, A Chortos, Y Wang et al. Stretchable temperature-sensing circuits with strain suppression based on carbon nanotube transistors. Nat Electron, 1, 183(2018).

    [131] A K K Kyaw, H H C Loh, F Yan et al. A polymer transistor array with a pressure-sensitive elastomer for electronic skin. J Mater Chem C, 5, 12039(2017).

    [132] J Kim, D Son, M Lee et al. A wearable multiplexed silicon nonvolatile memory array using nanocrystal charge confinement. Sci Adv, 2, e1501101(2016).

    [133] H Wang, P Wei, Y Li et al. Tuning the threshold voltage of carbon nanotube transistors by n-type molecular doping for robust and flexible complementary circuits. Proc Natl Acad Sci, 111, 4776(2014).

    [134] J Kim, A Banks, H Cheng et al. Epidermal electronics with advanced capabilities in near-field communication. Small, 11, 906(2015).

    [135] J Kim, A Banks, Z Xie et al. Miniaturized flexible electronic systems with wireless power and near-field communication capabilities. Adv Funct Mater, 25, 4761(2015).

    [136] A Miyamoto, S Lee, N F Cooray et al. Inflammation-free, gas-permeable, lightweight, stretchable on-skin electronics with nanomeshes. Nat Nanotechnol, 12, 907(2017).

    [137] L Tian, B Zimmerman, A Akhtar et al. Large-area MRI-compatible epidermal electronic interfaces for prosthetic control and cognitive monitoring. Nat Biomed Eng, 3, 194(2019).

    [138] Y Zhang, H Fu, S Xu et al. A hierarchical computational model for stretchable interconnects with fractal-inspired designs. J Mech Phys Solids, 72, 115(2014).

    [139] Z Huang, Y Hao, Y Li et al. Three-dimensional integrated stretchable electronics. Nat Electron, 1, 473(2018).

    [140] B Xu, A Akhtar, Y Liu et al. An epidermal stimulation and sensing platform for sensorimotor prosthetic control, management of lower back exertion, and electrical muscle activation. Adv Mater, 28, 4462(2016).

    [141] H Chen, Y Cao, J Zhang et al. Large-scale complementary macroelectronics using hybrid integration of carbon nanotubes and IGZO thin-film transistors. Nat Commun, 5, 4097(2014).

    [142] H E Lee, S Kim, J Ko et al. Skin-like oxide thin-film transistors for transparent displays. Adv Funct Mater, 26, 6170(2016).

    [143] T Lei, L L Shao, Y Q Zheng et al. Low-voltage high-performance flexible digital and analog circuits based on ultrahigh-purity semiconducting carbon nanotubes. Nat Commun, 10, 2161(2019).

    [144] B C K Tee, A Chortos, A Berndt et al. A skin-inspired organic digital mechanoreceptor. Science, 350, 313(2015).

    [145] C Yeom, K Chen, D Kiriya et al. Large-area compliant tactile sensors using printed carbon nanotube active-matrix backplanes. Adv Mater, 27, 1561(2015).

    [146] T Sekitani, T Yokota, U Zschieschang et al. Organic nonvolatile memory transistors for flexible sensor arrays. Science, 326, 1516(2009).

    [147] C Bartolozzi, L Natale, F Nori et al. Robots with a sense of touch. Nat Mater, 15, 921(2016).

    [148] J Kim, J R Sempionatto, S Imani et al. Simultaneous monitoring of sweat and interstitial fluid using a single wearable biosensor platform. Adv Sci, 5, 1800880(2018).

    [149] H Lee, C Song, S Baik et al. Device-assisted transdermal drug delivery. Adv Drug Deliv Rev, 127, 35(2018).

    [150] H U Chung, B H Kim, J Y Lee et al. Binodal, wireless epidermal electronic systems with in-sensor analytics for neonatal intensive care. Science, 363, eaau0780(2019).

    [151] Z Ma, P Chen, W Cheng et al. Highly sensitive, printable nanostructured conductive polymer wireless sensor for food spoilage detection. Nano Lett, 18, 4570(2018).

    [152] A J Bandodkar, P Gutruf, J Choi et al. Battery-free, skin-interfaced microfluidic/electronic systems for simultaneous electrochemical, colorimetric, and volumetric analysis of sweat. Sci Adv, 5, eaav3294(2019).

    [153] Z Cao, P Chen, Z Ma et al. Near-field communication sensors. Sensors, 19, 3947(2019).

    [154] L Y Chen, B C K Tee, A L Chortos et al. Continuous wireless pressure monitoring and mapping with ultra-small passive sensors for health monitoring and critical care. Nat Commun, 5, 5028(2014).

    [155] S Niu, N Matsuhisa, L Beker et al. A wireless body area sensor network based on stretchable passive tags. Nat Electron, 2, 361(2019).

    [156] P Maiolino, M Maggiali, G Cannata et al. A flexible and robust large scale capacitive tactile system for robots. IEEE Sens J, 13, 3910(2013).

    [157] M Liu, X Pu, C Jiang et al. Large-area all-textile pressure sensors for monitoring human motion and physiological signals. Adv Mater, 29, 1703700(2017).

    [158] X Wu, Y Han, X Zhang et al. Large-area compliant, low-cost, and versatile pressure-sensing platform based on microcrack-designed carbon black@polyurethane sponge for human−machine interfacing. Adv Funct Mater, 26, 6246(2016).

    [159] J Kim, M Lee, H J Shim et al. Stretchable silicon nanoribbon electronics for skin prosthesis. Nat Commun, 5, 5747(2014).

    [160] J Viventi, D H Kim, J D Moss et al. A conformal, bio-interfaced class of silicon electronics for mapping cardiac electrophysiology. Sci Trans Med, 2, 24ra22(2010).

    [161] Y J Park, B K Sharma, S M Shinde et al. All MoS2-based large area, skin-attachable active-matrix tactile sensor. ACS Nano, 13, 3023(2019).

    [162] S K Kim, E A Kirchner, A Stefes et al. Intrinsic interactive reinforcement learning – Using error-related potentials for real world human-robot interaction. Sci Rep, 7, 1(2017).

    [163] S Sundaram, P Kellnhofer, Y Li et al. Learning the signatures of the human grasp using a scalable tactile glove. Nature, 569, 698(2019).

    [164] M Markovic, M A Schweisfurth, L F Engels et al. Myocontrol is closed-loop control: incidental feedback is sufficient for scaling the prosthesis force in routine grasping. J NeuroEngineering Rehabil, 15, 81(2018).

    [165] A P Gerratt, H O Michaud, S P Lacour. Elastomeric electronic skin for prosthetic tactile sensation. Adv Funct Mater, 25, 2287(2015).

    [166] X Jin, D D Zhu, B Z Chen et al. Insulin delivery systems combined with microneedle technology. Adv Drug Deliv Rev, 127, 119(2018).

    [167] E K W Tan, Y Z Au, G K Moghaddam et al. Towards closed-loop integration of point-of-care technologies. Trends Biotechnol, 37, 775(2019).

    [168] H Lee, T K Choi, Y B Lee et al. A graphene-based electrochemical device with thermoresponsive microneedles for diabetes monitoring and therapy. Nat Nanotechnol, 11, 566(2016).

    [169] Y Zhang, J Wang, J Yu et al. Bioresponsive microneedles with a sheath structure for H2O2 and pH cascade-triggered insulin delivery. Small, 14, 1704181(2018).

    [170] H Lee, C Song, Y S Hong et al. Wearable/disposable sweat-based glucose monitoring device with multistage transdermal drug delivery module. Sci Adv, 3, e1601314(2017).

    [171] Z Tong, J Zhou, J Zhong et al. Glucose-and H2O2-responsive polymeric vesicles integrated with microneedle patches for glucose-sensitive transcutaneous delivery of insulin in diabetic rats. ACS Appl Mater Interfaces, 10, 20014(2018).

    [172] A Koh, D Kang, Y Xue et al. A soft, wearable microfluidic device for the capture, storage, and colorimetric sensing of sweat. Sci Trans Med, 8, 366ra165(2016).

    [173] J Yu, Y Zhang, Y Ye et al. Microneedle-array patches loaded with hypoxia-sensitive vesicles provide fast glucose-responsive insulin delivery. Proc Natl Acad Sci, 112, 8260(2015).

    [174] I R Minev, P Musienko, A Hirsch et al. Electronic dura mater for long-term multimodal neural interfaces. Science, 347, 159(2015).

    [175] L Li, L Pan, Z Ma et al. All inkjet-printed amperometric multiplexed biosensors based on nanostructured conductive hydrogel electrodes. Nano Lett, 18, 3322(2018).

    [176] S Fu, J Tao, W Wu et al. Fabrication of large-area bimodal sensors by all-inkjet-printing. Adv Mater Technol, 4, 1800703(2019).

    Zhong Ma, Desheng Kong, Lijia Pan, Zhenan Bao. Skin-inspired electronics: emerging semiconductor devices and systems[J]. Journal of Semiconductors, 2020, 41(4): 041601
    Download Citation