Qiang Huang, Yi Zhang, Peilin Jiang, Changliang Yu, Haotian Shi, Chukun Huang, Junqiang Sun. Research on High-Efficiency Coupling Gratings Applied to Silicon Germanium Materials[J]. Laser & Optoelectronics Progress, 2022, 59(19): 1913002
- Laser & Optoelectronics Progress
- Vol. 59, Issue 19, 1913002 (2022)
Fig. 1. Structure and cross-section of SiGe grating coupler
Fig. 2. Relationship between coupling efficiency, etch depth, and operating wavelength
Fig. 3. Coupling efficiency spectra of SiGe grating with and without metal reflective layer
Fig. 4. Simulation results of SiGe grating with and without metal reflective layer. (a) Simulated electric field distribution; (b) simulated optical power distribution
Fig. 5. Coupling efficiency spectra of uniform SiGe gratings and two-step apodized SiGe grating
Fig. 6. Relationship between the coupling efficiency of SiGe grating and the thickness of silicon substrate
Fig. 7. Relationship between the etched groove width deviation and coupling efficiency of SiGe grating
Fig. 8. Relationship between the coupling efficiency and material effective refractive index deviation of SiGe grating
Fig. 9. Test results. (a) SEM image of SiGe grating; (b) partially enlarged SEM image of coupled grating; (c) metallographic microscope image of chip backside; (d) partially enlarged metallographic image of bottom metal reflective layer
Fig. 10. Schematic diagram of test device
Fig. 11. Comparison of experimental test and simulation results
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