• Laser & Optoelectronics Progress
  • Vol. 59, Issue 19, 1913002 (2022)
Qiang Huang1、2, Yi Zhang1, Peilin Jiang1, Changliang Yu3, Haotian Shi1, Chukun Huang1, and Junqiang Sun1、*
Author Affiliations
  • 1Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, Hubei, China
  • 2Hunan Province Key Laboratory of Grids Operation and Control on Multi-Power Sources Area, School of Electrical Engineering, Shaoyang University, Shaoyang 422000, Hunan, China
  • 3Wuhan Fisilink Microelectronics Technology Co., Ltd., Wuhan 430040, Hubei, China
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    DOI: 10.3788/LOP202259.1913002 Cite this Article Set citation alerts
    Qiang Huang, Yi Zhang, Peilin Jiang, Changliang Yu, Haotian Shi, Chukun Huang, Junqiang Sun. Research on High-Efficiency Coupling Gratings Applied to Silicon Germanium Materials[J]. Laser & Optoelectronics Progress, 2022, 59(19): 1913002 Copy Citation Text show less

    Abstract

    In this paper, we propose a SiGe grating coupler to realize vertical coupling between the single-mode fiber and the SiGe on-chip device. To improve the coupling efficiency of the SiGe grating, we adopted a metal layer as the reflecting mirror on the chip backside, and we optimized the structure, including the etch depth, etch groove width, and grating period, using the finite-different time-domain method. We computed the grating coupling efficiency by analyzing the power and electric field distribution with and without the metal reflective layer. The simulation results show that the maximum coupling efficiency of the uniform grating is increased by 9.4 dB compared with the case without a metal layer, and its directionality is significantly improved. The maximum coupling efficiency of the SiGe grating obtained by simulation optimization is -1.34 dB at 1466 nm. Furthermore, we simulated and designed a two-step apodized grating based on the uniform grating, which further increased the maximum coupling efficiency by 0.55 dB compared with the uniform. Additionally, we performed a tolerance analysis on the coupled grating, including the thickness of the metal layer, the refractive index of the SiGe material, and the size of the grating. The analysis results show that the SiGe grating has a high tolerance for process deviations. Also, we fabricated a SiGe coupling grating, and the test results show that the maximum coupling efficiency of -2.7 dB is obtained at 1465 nm.
    Qiang Huang, Yi Zhang, Peilin Jiang, Changliang Yu, Haotian Shi, Chukun Huang, Junqiang Sun. Research on High-Efficiency Coupling Gratings Applied to Silicon Germanium Materials[J]. Laser & Optoelectronics Progress, 2022, 59(19): 1913002
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