Surface Roughness Measurement Using Laser Confocal Microscope with Boundary Area Correction

Ye Han; Weng Zuxin; Zhang Yunhai; Miu Jia; Xiao Yun

doi:10.3788/LOP57.211203

[1] Whitehouse D J. Surface metrology[J]. Measurement Science and Technology, 8, 955-972(1997).

[2] Wu S Q[M]. Application guide of surface roughness(1990).

[3] He B F, Ding S Y, Wei C E et al. Review of measurement methods for areal surface roughness[J]. Optics and Precision Engineering, 27, 78-93(2019).

[4] Young R D. Surface microtopography[J]. Physics Today, 24, 42-49(1971).

[5] Suganuma T. Measurement of surface topography using SEM with two secondary electron detectors[J]. Journal of Electron Microscopy, 34, 328-337(1985). http://jmicro.oxfordjournals.org/content/34/4/328.abstract

[6] Zhu X[J]. Scanning near-field optical microscope Modern Scientific Instruments, 1996, 7-9.

[7] Dürig U, Pohl D W, Rohner F. Near-field optical-scanning microscopy[J]. Journal of Applied Physics, 59, 3318-3327(1986).

[8] Han X G, Wu Z S. Study of measuring method of surface roughness for metal base and coating[J]. Journal of Applied Optics, 17, 38-43(1996).

[9] Chang S P. Non-contact measurement method and system based on white light interference contour size and morphology[D]. Wuhan: Huazhong University of Science and Technology(2007).

[10] Caber P J. Interferometric profiler for rough surfaces[J]. Applied Optics, 32, 3438-3441(1993).

[11] Chen Z, Jiang H Z, Liu X et al. Measurement of surface defects of optical elements using digital holography[J]. Optics and Precision Engineering, 25, 576-583(2017).

[13] Tong X L, Li Y H, Lin H S et al. Research on phase-shifting interferometry contrast three-dimensional topography of ultra precision surface[J]. Journal of Electronic Measurement and Instrument, 23, 65-69(2009).

[14] Chen G, Zhou W J, Hu Z et al. Surface roughness measurement based on digital holography[J]. Journal of Applied Optics, 35, 1040-1047(2014).

[15] National Technical Committee for Standardization of Geometrical Product Specifications,. Terms,(2009).

[16] National Technical Committee for Standardization of Geometrical Product Specifications,(2011).

[17] International Organization for Standardization. Gaussian filters: ISO 16610-21-2011[S]. London: International Organization for Standardization(2011).

[18] National Technical Committee for Standardization of Geometrical Product Specifications,(2009).

[19] National Technical Committee for Standardization of Geometrical Product Specifications,. Nominal characteristic of contact (stylus)(2009).