Ye Han, Weng Zuxin, Zhang Yunhai, Miu Jia, Xiao Yun. Surface Roughness Measurement Using Laser Confocal Microscope with Boundary Area Correction[J]. Laser & Optoelectronics Progress, 2020, 57(21): 211203
- Laser & Optoelectronics Progress
- Vol. 57, Issue 21, 211203 (2020)
Fig. 1. Transmission coefficients of roughness and waviness contours
Fig. 2. Steps for extracting roughness contours
Fig. 3. Unfiltered contour and filtered contour
Fig. 4. Extended original contour and filtered contour
Fig. 5. Original contour and filtered contours using different methods
Fig. 6. Sample map and layer-by-layer confocal imaging results. (a)(b) Gentle samples; (c)(d) steep samples
Fig. 7. Reconstructed 3D contours of samples. (a) Smooth sample; (b) steep sample
Fig. 8. Experimental results of smooth sample. (a) Conventional method; (b) boundary area correction method
Fig. 9. Experimental results of steep sample. (a) Conventional method; (b) boundary area correction method
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Table 1. Variance of actual contour and filtered contour treated by using two methods
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Table 2. Selection criteria for sampling length lr
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Table 3. Selection criteria for cut-off wavelength
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Table 4. Roughness value Ra of smooth sample
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Table 5. Roughness value Ra of steep sample
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