Fig. 1. Normalized speckle size varying with normalized distance^[68]

Fig. 2. Schematic diagram of wavefront reconstruction using X-ray near-field speckle. (a) Speckle displacement v₁ and refraction angle α measured by matching reference subset and target subset; (b) schematic diagram of wavefront reconstruction using refraction angle α

Fig. 3. Schematic diagrams of two modes for X-ray near-field speckle based wavefront metrology. (a) Absolute mode; (b) differential mode

Fig. 4. Schematic diagrams of XST and XSVT. (a) XST in differential mode; (b) XSVT in differential mode

Fig. 5. Schematic diagram of XSS in differential mode

Fig. 6. Schematic diagram of self-correlation XSS

Fig. 7. Schematic diagram of PXST

Fig. 8. Data processing flow chart for PXST

Fig. 9. Wavefront of beam detected by XST ^[60]. (a) Optical layout; (b) result of wavefront reconstruction

Fig. 10. Plane mirror detected by XSS^[37]. (a) Optical layout; (b) comparison of XSS and NOM detection results; (c) detection result comparsion of two modes of XSS; (d) profile error comparison; (e) power spectral density comparison

Fig. 11. Bimorph mirror detected and optimized by XSS^[78]. (a) Optical layout, A₁--A₈ are electrodes of bimorph mirror; intensity distribution varying with distance between bimorph mirror and detector (b) before and (c) after optimization; focal spot size measured by gold wire scanning (d) before and (e) after optimization

Fig. 12. CRL detected by XST. (a) Picture of experimental site; (b) profile detection result of CRL; (c) comparison of XST and confocal laser scanning microscopy detection results