• Chinese Optics Letters
  • Vol. 20, Issue 1, 011902 (2022)
Renhong Gao1、6, Ni Yao2, Jianglin Guan3、4, Li Deng3、4, Jintian Lin1、6、*, Min Wang3、4, Lingling Qiao1, Wei Fang5, and Ya Cheng1、3、4、6、7、8、9、**
Author Affiliations
  • 1State Key Laboratory of High Field Laser Physics and CAS Center for Excellence in Ultra-Intense Laser Science, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences (CAS), Shanghai 201800, China
  • 2Research Center for Intelligent Sensing, Zhejiang Lab, Hangzhou 311100, China
  • 3XXL—The Extreme Optoelectromechanics Laboratory, School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China
  • 4State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China
  • 5State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
  • 6Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 7Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
  • 8Collaborative Innovation Center of Light Manipulations and Applications, Shandong Normal University, Jinan 250358, China
  • 9Shanghai Research Center for Quantum Sciences, Shanghai 201315, China
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    DOI: 10.3788/COL202220.011902 Cite this Article Set citation alerts
    Renhong Gao, Ni Yao, Jianglin Guan, Li Deng, Jintian Lin, Min Wang, Lingling Qiao, Wei Fang, Ya Cheng. Lithium niobate microring with ultra-high Q factor above 108[J]. Chinese Optics Letters, 2022, 20(1): 011902 Copy Citation Text show less

    Abstract

    We demonstrate integrated lithium niobate (LN) microring resonators with Q factors close to the intrinsic material absorption limit of LN. The microrings are fabricated on pristine LN thin-film wafers thinned from LN bulk via chemo-mechanical etching without ion slicing and ion etching. A record-high Q factor up to 108 at the wavelength of 1550 nm is achieved because of the ultra-smooth interface of the microrings and the absence of ion-induced lattice damage, indicating an ultra-low waveguide propagation loss of 0.0034 dB/cm. The ultra-high Q microrings will pave the way for integrated quantum light source, frequency comb generation, and nonlinear optical processes.
    Lp=10·α·loge=10·(2πneff/(Qiλ))·loge,

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    Renhong Gao, Ni Yao, Jianglin Guan, Li Deng, Jintian Lin, Min Wang, Lingling Qiao, Wei Fang, Ya Cheng. Lithium niobate microring with ultra-high Q factor above 108[J]. Chinese Optics Letters, 2022, 20(1): 011902
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