Binbin Sheng, Ling Wang, Jintong Xu, Xiangyang Li. Extraction of Material Parameters by Transmission Spectra of AlGaN Film[J]. Acta Optica Sinica, 2021, 41(3): 0313001
- Acta Optica Sinica
- Vol. 41, Issue 3, 0313001 (2021)
Fig. 1. Structure plot of the samples and light propagation plot. (a) Structure plot; (b) light propagation plot
Fig. 2. Measured transmission spectra of the samples
Fig. 3. Fitted transmission spectra. (a) Sample 1; (b) sample 2
Fig. 4. AFM images and horizontal section height profiles. (a)(b) Sample 1; (c)(d) sample 2
Fig. 5. Fitted absorption coefficient from the films transfer matrix of samples 1 and 2
Fig. 6. Fitted refractive index from transmission spectra of samples 1 and 2
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Table 1. Fitted parameters of transmission spectra
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