Extraction of Material Parameters by Transmission Spectra of AlGaN Film

Binbin Sheng; Ling Wang; Jintong Xu; Xiangyang Li

doi:10.3788/AOS202141.0313001

Journals >Acta Optica Sinica >Volume 41 >Issue 3 >Page 0313001 > Article

Acta Optica Sinica
Vol. 41, Issue 3, 0313001 (2021)

Extraction of Material Parameters by Transmission Spectra of AlGaN Film

Binbin Sheng^{1、2、3、4}, Ling Wang^1、2、*, Jintong Xu^1、2, and Xiangyang Li^{1、2、3、4}

Author Affiliations

¹State Key Laboratory of Transducer Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

²Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

³School of Information Science and Technology, ShanghaiTech University, Shanghai 201210, China

⁴University of Chinese Academy of Sciences, Beijing 100049, China

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DOI: 10.3788/AOS202141.0313001 Cite this Article Set citation alerts

Binbin Sheng, Ling Wang, Jintong Xu, Xiangyang Li. Extraction of Material Parameters by Transmission Spectra of AlGaN Film[J]. Acta Optica Sinica, 2021, 41(3): 0313001 Copy Citation Text

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Binbin Sheng, Ling Wang, Jintong Xu, Xiangyang Li. Extraction of Material Parameters by Transmission Spectra of AlGaN Film[J]. Acta Optica Sinica, 2021, 41(3): 0313001

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